Patents by Inventor Yasuhiro TSURUMA

Yasuhiro TSURUMA has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • INFORMATION PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
    Publication number: 20220291662
    Abstract: A reception unit receives a processing instruction including a recipe. A calculation unit calculates an identifier from the recipe received by the receiving unit. A determination unit determines whether an identical identifier to the calculated identifier is stored in a memory. A control unit controls a substrate processing apparatus using an operation data item associated with the identical identifier and the recipe received by the receiving unit when the determination unit determines that the identical identifier is stored in the memory.
    Type: Application
    Filed: August 12, 2020
    Publication date: September 15, 2022
    Applicant: TOKYO ELECTRON LIMITED
    Inventors: Hiroshi OGINO, Masanori SAITO, Noriaki KANAYA, Yasuhiro TSURUMA