Abstract: Disclosed is fluorocarbon-based dry etching gas which is free of global environmental problems and a dry etching method using a plasma gas obtained therefrom. The dry etching gas includes a fluorinated ether of carbon, fluorine, hydrogen and oxygen and having 2-6 carbon atoms.

Abstract: The present invention provides a process for preparing a perfluoroalkyl bromide characterized by reacting a perfluoroalkyl iodide represented by the formula C.sub.n F.sub.2n+1 I wherein n is an integer of 6 to 10 with bromine in a light-transmitting reactor with exposure to light and heating at 120.degree. to 180.degree. C. while simultaneously removing IBr resulting as a by-product by separation of a layer.

Abstract: A process for production of 1,1,1-trifluoro-2,2-dichloroethane comprising chlorination of 1,1,1-trifluoro-2-chloroethane with chlorine gas in the presence or absence of a metal salt as a catalyst.

Abstract: A fluoroalcohol of the formulaRf(CH.sub.2 CH.sub.2 OH)n (1)is prepared by the following three kinds of processes:(a) by contacting a betaine compound with a halide compound of the formulaRf(CH.sub.2 CH.sub.2 X)n (2)to obtain an intermediate compound and subjecting the intermediate compound to hydrolysis,(b) by contacting a betaine compound and water in the presence of an organic solvent with a halide compound of the formulaRf(CH.sub.2 CH.sub.2 X)n (2), or(c) by contacting a betaine type surfactant and water with a halide compound of the formulaRf(CH.sub.2 CH.sub.2 X)n (2),wherein Rf is C.sub.2.about.13 fluoroalkyl or C.sub.2.about.13 fluoroalkylene group, X is iodine or bromine, n is 1 when Rf is fluoroalkyl group and n is 2 when Rf is fluoroalkylene group.

Abstract: A process for production of 1,1,1-trifluoro-2,2-dichloroethane comprising chlorinationo f 1,1,1-trifluoro-2-chloroethane with chlorine gas in the presence or absence of a metal salt as a catalyst.

Abstract: A process for production of 1,1,1-trifluoro-2,2-dichloroethane comprising reacting 1,1,1-trifluoro-2-chloroethane with hydrogen chloride and oxygen in the presence of a metal salt as a catalyst.

Abstract: Triperfluoroalkylamines of the formula: ##STR1## wherein, Rf.sup.1 and Rf.sup.2 are each a perfluoroalkyl group having 1 to 4 carbon atoms, and Rf.sup.3 is a perfluoroalkyl group having 3 to 11 carbon atoms, have good thermal stability, good voltage resistance, good fluidity at low temperature and low surface energy and which produce no toxic perfluoroisobutene.

Abstract: A halogenated alkane of the formulaR--CHXY (I)wherein R is a trifluoromethyl group, a chlorodifluoromethyl group, a dichlorofluoromethyl group, a chlorofluoromethyl group, a difluoromethyl group, a fluoromethyl group or a 2-chloro-1,1,2,2-tetrafluoroethyl group, and X and Y are the same or different and a hydrogen atom, a chlorine atom or a fluorine atom can be prepared at a high yield by reducing a halogenated alkane of the formula:R--CClXY (II)wherein R, X and Y are the same as defined above with the irradiation of light having a wavelength of not longer than 300 nm in an oxygen-free reaction atmosphere in the presence of 3 to 10 moles of an alcohol per mole of the halogenated alkane of the formula (II) or in the presence of 0.1 to 10 moles of an alcohol per mole of the halogenated alkane of the formula (II) and an alkali.

Abstract: A novel fluorine-containing compound of the formula:(CF.sub.3).sub.2 CHCO.sub.2 CClX.sup.1 X.sup.2 (I)wherein X.sup.1 and X.sup.2 are, the same or different, each a hydrogen atom or a chlorine atom, which is useful as the starting material for production of 2-trifluoromethyl-3,3,3-trifluoropropene.

Abstract: Process for preparing 2-trifluoro-methyl-3,3,3-trifluoropropene.

Abstract: A process for preparing a trifluoromethylbenzonitrile derivative of the formula: ##STR1## wherein X is hydrogen, lower alkyl, halogenated lower alkyl, lower alkoxy, nitro, hydroxyl, amino, cyano, carboxyl or sulfon which comprises reacting trifluoromethylhalogenobenzene of the formula: ##STR2## wherein X is as defined above, and Y is halogen with copper (I) cyanide in a solvent selected from the group consisting of hexamethylphosphoric triamide, N-methylpyrrolidone and a mixture thereof in the presence of a catalyst selected from the group consisting of (A) bromine, (B) iodine, (C) a combination of bromine or iodine and metallic copper and (D) copper (II) bromide, by which process the compound (I) is prepared in a good yield, and by-products are produced in a lower yield than the conventional processes.