Abstract: A MEMS microphone includes: a glass substrate including an opening portion; a membrane provided on the glass substrate so as to cover the opening portion and including a first conductive layer; and a backplate provided above the membrane via a cavity, including a plurality of through holes through which sound waves pass, and including a second conductive layer. The first conductive layer is made of a metal or a conductive oxide. The second conductive layer is made of a metal or a conductive oxide.

Abstract: An object of the present invention is to prevent loss of oil film and improve lubrication performance of the bearing by eliminating angled portions at butting surfaces in a two-piece retainer. A two-piece retainer is made by assembling a pair of semi-annular retainer parts into an annular structure. As assembled, lubricant reservoir grooves are formed, each by two arc-shaped groove wall surfaces which are formed on both sides of the butting surface, and by a groove bottom which is formed at a region including the butting surface.

Abstract: A liquid crystal display device and a manufacturing method thereof which can suppress chipping of an alignment film or the like are provided. A liquid crystal display device and a manufacturing method thereof which can obviate the complication of manufacturing steps and the increase of a manufacturing cost are also provided. A liquid crystal display device includes: a TFT substrate; a counter substrate; and liquid crystal sandwiched between the TFT substrate and the counter substrate. A plurality of color filters are arranged on the counter substrate, and spacers are formed by stacking the plurality of color filters and by covering a surface of stacked color filters with an overcoat layer. Pedestals are formed on the TFT substrate in a state where the pedestal faces the spacer in an opposed manner. The pedestal is formed by stacking at least a semiconductor layer and a metal layer formed which are simultaneously with a thin film transistor on the TFT substrate.

Abstract: An object of the present invention is to prevent loss of oil film and improve lubrication performance of the bearing by eliminating angled portions at butting surfaces in a two-piece retainer. A two-piece retainer is made by assembling a pair of semi-annular retainer parts into an annular structure. As assembled, lubricant reservoir grooves are formed, each by two arc-shaped groove wall surfaces which are formed on both sides of the butting surface, and by a groove bottom which is formed at a region including the butting surface.

Abstract: An object of the present invention is to provide a display device where a semiconductor layer pattern formed between a pair of electrodes can be formed to a predetermined size, even in the case where the distance between the electrodes on top of a semiconductor layer pattern is relatively large in elements formed in accordance with a photoresist reflow technology.

Abstract: A liquid crystal display device and a manufacturing method thereof which can suppress chipping of an alignment film or the like are provided. A liquid crystal display device and a manufacturing method thereof which can obviate the complication of manufacturing steps and the increase of a manufacturing cost are also provided. A liquid crystal display device includes: a TFT substrate; a counter substrate; and liquid crystal sandwiched between the TFT substrate and the counter substrate. A plurality of color filters are arranged on the counter substrate, and spacers are formed by stacking the plurality of color filters and by covering a surface of stacked color filters with an overcoat layer. Pedestals are formed on the TFT substrate in a state where the pedestal faces the spacer in an opposed manner. The pedestal is formed by stacking at least a semiconductor layer and a metal layer formed which are simultaneously with a thin film transistor on the TFT substrate.

Abstract: A display device with signal lines formed on a substrate and an organic insulation film which covers the signal lines and is formed over an upper layer side of the substrate, the display device further includes a terminal portion on which a conductive film is formed in a state that the conductive film covers portions of the signal lines which are exposed through openings formed in the organic insulation film, wherein the organic insulation film sets a film thickness thereof at a periphery of the terminal portion smaller than the film thickness at other portions, and a surface of small-film-thickness portion arranged in peripheries of the openings is formed into an uneven surface.

Abstract: The proceeding of peeling of a conductive layer in the vicinity of terminals is prevented. A display panel includes a conductive layer extending to the outside of terminals, and the conductive layer has slits extending in directions from one end face to the other end face alternately at two end faces along the extending direction of the conductive layer.

Abstract: An object of the present invention is to provide a display device where a semiconductor layer pattern formed between a pair of electrodes can be formed to a predetermined size, even in the case where the distance between the electrodes on top of a semiconductor layer pattern is relatively large in elements formed in accordance with a photoresist reflow technology.

Abstract: A liquid crystal display device comprises a pair of substrates which are arranged to face each other in an opposed manner while sandwiching liquid crystal therebetween, pixel regions which are formed on a liquid-crystal-side surface of one substrate out of the pair of substrates, and thin film transistors which are formed on respective pixel regions, wherein each thin film transistor includes a gate electrode connected to a gate signal line, a semiconductor layer laminated to the gate electrode by way of an insulation film, a drain electrode formed on the semiconductor layer and connected to a drain signal line, and a source electrode connected to a pixel electrode, and the semiconductor layer is formed in a periodically irregular shape in a zone having a width substantially larger than a width of the source electrode on a side thereof from which at least the source electrode is pulled out.

Abstract: A liquid crystal display device comprises a pair of substrates which are arranged to face each other in an opposed manner while sandwiching liquid crystal therebetween, pixel regions which are formed on a liquid-crystal-side surface of one substrate out of the pair of substrates, and thin film transistors which are formed on respective pixel regions, wherein each thin film transistor includes a gate electrode connected to a gate signal line, a semiconductor layer laminated to the gate electrode by way of an insulation film, a drain electrode formed on the semiconductor layer and connected to a drain signal line, and a source electrode connected to a pixel electrode, and the semiconductor layer is formed in a periodically irregular shape in a zone having a width substantially larger than a width of the source electrode on a side thereof from which at least the source electrode is pulled out.

Abstract: An active matrix liquid crystal display device includes a plurality of gate signal lines and a plurality of drain signal lines formed on a substrate. The gate signal lines extend in parallel to one another, and the drain signal lines extend in parallel to one another, and a dummy line is formed between each of adjacent parallel extending drain signal lines.

Abstract: A display device is provided with a first contact hole formed in a display region and a second contact hole formed in a terminal region, and a first insulating layer and a second insulating layer formed in that order. The taper angle of the first insulating layer at the first contact hole is larger than the taper angle of the first insulating layer at the second contact hole, and the taper angle of the second insulating layer at the first contact hole is larger than the taper angle of the second insulating layer around the second contact hole.

Abstract: A liquid crystal display device comprises a pair of substrates which are arranged to face each other in an opposed manner while sandwiching liquid crystal therebetween, pixel regions which are formed on a liquid-crystal-side surface of one substrate out of the pair of substrates, and thin film transistors which are formed on respective pixel regions, wherein each thin film transistor includes a gate electrode connected to a gate signal line, a semiconductor layer laminated to the gate electrode by way of an insulation film, a drain electrode formed on the semiconductor layer and connected to a drain signal line, and a source electrode connected to a pixel electrode, and the semiconductor layer is formed in a periodically irregular shape in a zone having a width substantially larger than a width of the source electrode on a side thereof from which at least the source electrode is pulled out.

Abstract: The proceeding of peeling of a conductive layer in the vicinity of terminals is prevented. A display panel includes a conductive layer extending to the outside of terminals, and the conductive layer has slits extending in directions from one end face to the other end face alternately at two end faces along the extending direction of the conductive layer.

Abstract: A display device with signal lines formed on a substrate and an organic insulation film which covers the signal lines and is formed over an upper layer side of the substrate, the display device further includes a terminal portion on which a conductive film is formed in a state that the conductive film covers portions of the signal lines which are exposed through openings formed in the organic insulation film, wherein the organic insulation film sets a film thickness thereof at a periphery of the terminal portion smaller than the film thickness at other portions, and a surface of small-film-thickness portion arranged in peripheries of the openings is formed into an uneven surface.

Abstract: A display device is provided with a first contact hole formed in a display region and a second contact hole formed in a terminal region, and a first insulating layer and a second insulating layer are formed in that order. The taper angle of the first insulating layer at the first contact hole is larger than the taper angle of the first insulating layer at the second contact hole, and the taper angle of the second insulating layer at the first contact hole is larger than the taper angle of the second insulating layer around the second contact hole.

Abstract: To develop a small quantity of various kinds of semiconductor devices in a short time and to realize a photomask suitable to be manufactured at a low cost. A shade pattern of a photomask is constituted by containing nanoparticles such as carbon in an organic film such as a photoresist film. A pattern is transferred to a photoresist on a semiconductor wafer by means of the reduction projection exposure using the photomask. At the time of the above exposure, it is possible to select exposure light within a range of wide wavelengths including i-line, KrF excimer laser beam, ArF excimer laser beam, or the like.

Abstract: To develop a small quantity of various kinds of semiconductor devices in a short time and to realize a photomask suitable to be manufactured at a low cost. A shade pattern of a photomask is constituted by containing nanoparticles such as carbon in an organic film such as a photoresist film. A pattern is transferred to a photoresist on a semiconductor wafer by means of the reduction projection exposure using the photomask. At the time of the above exposure, it is possible to select exposure light within a range of wide wavelengths including i-line, KrF excimer laser beam, ArF excimer laser beam, or the like.

Abstract: A liquid crystal display device comprises a pair of substrates which are arranged to face each other in an opposed manner while sandwiching liquid crystal therebetween, pixel regions which are formed on a liquid-crystal-side surface of one substrate out of the pair of substrates, and thin film transistors which are formed on respective pixel regions, wherein each thin film transistor includes a gate electrode connected to a gate signal line, a semiconductor layer laminated to the gate electrode by way of an insulation film, a drain electrode formed on the semiconductor layer and connected to a drain signal line, and a source electrode connected to a pixel electrode, and the semiconductor layer is formed in a periodically irregular shape in a zone having a width substantially larger than a width of the source electrode on a side thereof from which at least the source electrode is pulled out.