Patents by Inventor Yasuko Maeda

Yasuko Maeda has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Pattern position measuring apparatus
    Patent number: 5386294
    Abstract: Position of a pattern of a sample placed on a stage is detected by detecting position of a pattern edge. Distortion of the whole sample surface is detected by measuring height of the sample, slope of the surface of the sample at a detected pattern edge position is calculated, and the detected position of the pattern edge is corrected in accordance with the calculated slope.
    Type: Grant
    Filed: March 21, 1994
    Date of Patent: January 31, 1995
    Assignee: Nikon Corporation
    Inventors: Taro Ototake, Yasuko Maeda, Takakazu Ueki