Abstract: Provided is a valve for high-pressure gas, wherein a sheet member is provided inside a through hole formed in a valve body of the valve, wherein the sheet member constitutes a channel for high-pressure gas inside the through hole, wherein the sheet member is fixed inside the through hole by a pressing member, wherein an end opening of the through hole is closed by a lid member, wherein a gasket is provided at a peripheral part of the end opening of the through hole, wherein the gasket is sandwiched between the lid member and the valve body, wherein the lid member is pressed toward the valve body by a plug, and wherein a bearing is provided between the plug and the lid member.

Abstract: Provided are a seal structure in which sealing performance is ensured over a long period of time even when it is used for low-temperature fluids, a sealing method, and a coupling including the seal structure. The seal structure includes an annular gasket interposed between a first member and a second member. The first member is provided on its surface facing the gasket with: a first surface located on the inner diameter side; a first annular protrusion located on the outer diameter side of the first surface; a second surface located on the outer diameter side of the first protrusion; a second annular protrusion located on the outer diameter side of the second surface and having a greater protruding amount with respect to the second surface than that of the first protrusion; and a third surface located on the outer diameter side of the second protrusion.

Abstract: Provided is a valve for high-pressure gas, wherein a sheet member is provided inside a through hole formed in a valve body of the valve, wherein the sheet member constitutes a channel for high-pressure gas inside the through hole, wherein the sheet member is fixed inside the through hole by a pressing member, wherein an end opening of the through hole is closed by a lid member, wherein a gasket is provided at a peripheral part of the end opening of the through hole, wherein the gasket is sandwiched between the lid member and the valve body, wherein the lid member is pressed toward the valve body by a plug, and wherein a bearing is provided between the plug and the lid member.

Abstract: A valve device and semiconductor production device that can be used long-term without seizing even during high-temperature use, and which do not have contaminants in the chambers thereof. The valve device includes: a boosting mechanism that amplifies drive force; a first and second stem receive force amplified by the boosting mechanism and move; and a diaphragm capable of opening and closing fluid passages. The boosting mechanism includes: a retainer and bearings; shafts having both ends thereof supported by the bearings; and arms pivotably supported by the shafts and having an outer end portion that receives drive force and an inner end portion that amplifies and transmits drive force to the first stem. In the retainer, bearings, shafts, and arms, the bearings and both ends of the shaft constitute a swinging portion in conjunction with the swinging by the arms, and thereamong, the bearings include a carbon fiber composite material.

Abstract: Provided are a seal structure in which sealing performance is ensured over a long period of time even when it is used for low-temperature fluids, a sealing method, and a coupling including the seal structure. The seal structure includes an annular gasket interposed between a first member and a second member. The first member is provided on its surface facing the gasket with: a first surface located on the inner diameter side; a first annular protrusion located on the outer diameter side of the first surface; a second surface located on the outer diameter side of the first protrusion; a second annular protrusion located on the outer diameter side of the second surface and having a greater protruding amount with respect to the second surface than that of the first protrusion; and a third surface located on the outer diameter side of the second protrusion.

Abstract: Provided are a seal structure in which sealing performance is ensured over a long period of time even when it is used for low-temperature fluids, a sealing method, and a coupling including the seal structure. The seal structure includes an annular gasket interposed between a first member and a second member. The first member is provided on its surface facing the gasket with: an annular protrusion; an inclined surface located on an inner diameter side with respect to the annular protrusion and inclined in a direction away from the gasket; and an outer-diameter-side surface located on an outer diameter side with respect to the protrusion.

Abstract: Provided is a fluid controller which enables precise flow-rate adjustment while securing the durability. The fluid controller includes a stem vertical-movement-amount upper-limit-value setting means 10 which sets an upper limit value of a vertical movement amount of a stem 8 associated with opening and closing operations. The fluid controller further includes a stem vertical-movement-amount fine-adjustment means 11 which changes the vertical movement amount of the stem 8 associated with the opening and closing operations, within a range of not greater than the upper limit value.

Abstract: Provided is a fluid controller in which reduction of the accuracy caused by the loosening of a screw portion and reduction of the durability caused by torsional stress are prevented. A stem vertical-movement-amount adjustment means 11 is provided with: a handle 41 which has a female screw 41b on an inner periphery thereof and which is rotatably supported by a casing 4; a movable body 42 in which a male screw 46b is provided on an outer periphery thereof and is screwed into the inner periphery of the handle 41; and a guide means 43 which prevents rotation of the movable body 42 relative to the casing 4 and which enables vertical movement of the movable body 42.

Abstract: A vacuum valve is provided with opening pressure setting means that sets a set value of a fluid pressure in a primary side passage beyond which communication is opened and forcible opening means that forcibly opens communication regardless of the fluid pressure in the primary side passage. The opening pressure setting means includes a spring receiver fixed to a stem, a compression coil spring having a lower end supported by the spring receiver, and an adjustment screw, movable in the axial direction, that presses the upper end of the compression coil spring. The forcible opening means includes a piston inserted onto the stem 5 under the spring receiver so as to be movable upward and downward and piston driving means that moves the piston and the spring receiver upward integrally by moving the piston upward using compressed air.

Abstract: Provided is a fluid controller which enables precise flow-rate adjustment while securing the durability. The fluid controller includes a stem vertical-movement-amount upper-limit-value setting means 10 which sets an upper limit value of a vertical movement amount of a stem 8 associated with opening and closing operations. The fluid controller further includes a stem vertical-movement-amount fine-adjustment means 11 which changes the vertical movement amount of the stem 8 associated with the opening and closing operations, within a range of not greater than the upper limit value.

Abstract: Provided is a fluid controller in which reduction of the accuracy caused by the loosening of a screw portion and reduction of the durability caused by torsional stress are prevented. A stem vertical-movement-amount adjustment means 11 is provided with: a handle 41 which has a female screw 41b on an inner periphery thereof and which is rotatably supported by a casing 4; a movable body 42 in which a male screw 46b is provided on an outer periphery thereof and is screwed into the inner periphery of the handle 41; and a guide means 43 which prevents rotation of the movable body 42 relative to the casing 4 and which enables vertical movement of the movable body 42.

Abstract: A fluid controller includes an automatic opening-and-closing device configured to move a valve rod upward and downward, and a manual opening-and-closing device configured to move the valve rod upward and downward by a manual operation. The manual opening-and-closing device includes a cylindrical handle supported by a casing so as to be rotatable and not to move upward and downward, and a cylindrical operating member screwed into a female screw of the handle and configured to move upward and downward with a rotation of the handle. The operating member is apart from a piston of the automatic opening-and-closing device in a vertical direction in an automatic operation. The piston is moved by the operating member which moves upward in association with the rotating operation of the handle in a manual operation in an opposite direction from the opening state brought by the automatic opening-and-closing device.

Abstract: A vacuum valve is provided with opening pressure setting means that sets a set value of a fluid pressure in a primary side passage beyond which communication is opened and forcible opening means that forcibly opens communication regardless of the fluid pressure in the primary side passage. The opening pressure setting means includes a spring receiver fixed to a stem, a compression coil spring having a lower end supported by the spring receiver, and an adjustment screw, movable in the axial direction, that presses the upper end of the compression coil spring. The forcible opening means includes a piston inserted onto the stem 5 under the spring receiver so as to be movable upward and downward and piston driving means that moves the piston and the spring receiver upward integrally by moving the piston upward using compressed air.

Abstract: A fluid controller includes an automatic opening-and-closing device configured to move a valve rod upward and downward, and a manual opening-and-closing device configured to move the valve rod upward and downward by a manual operation. The manual opening-and-closing device includes a cylindrical handle supported by a casing so as to be rotatable and not to move upward and downward, and a cylindrical operating member screwed into a female screw of the handle and configured to move upward and downward with a rotation of the handle. The operating member is apart from a piston of the automatic opening-and-closing device in a vertical direction in an automatic operation. The piston is moved by the operating member which moves upward in association with the rotating operation of the handle in a manual operation in an opposite direction from the opening state brought by the automatic opening-and-closing device.