Patents by Inventor Yasumitsu Ueki

Yasumitsu Ueki has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for observing element distribution
    Patent number: 6855927
    Abstract: There are provided an element distribution observing method and an element distribution observing apparatus under utilization of core-loss electrons capable of restricting artifact caused by either a thickness or density of a specimen, or an occurrence of the artifact caused by a diffraction contrast. Electron beam intensities in a total three different energy-loss areas of two energy-loss areas not containing any core-loss electrons and one energy-loss area are calculated to attain an element distribution on the basis of the corresponding three energy-loss areas and an electron beam intensity.
    Type: Grant
    Filed: May 12, 2003
    Date of Patent: February 15, 2005
    Assignee: Hitachi High-Technologies Corporation
    Inventors: Yoshifumi Taniguchi, Kazutoshi Kaji, Yasumitsu Ueki, Shigeto Isakozawa
  • Method and apparatus for observing element distribution
    Publication number: 20040000641
    Abstract: There are provided an element distribution observing method and an element distribution observing apparatus under utilization of core-loss electrons capable of restricting artifact caused by either a thickness or density of a specimen, or an occurrence of the artifact caused by a diffraction contrast. Electron beam intensities in a total three different energy-loss areas of two energy-loss areas not containing any core-loss electrons and one energy-loss area are calculated to attain an element distribution on the basis of the corresponding three energy-loss areas and an electron beam intensity.
    Type: Application
    Filed: May 12, 2003
    Publication date: January 1, 2004
    Inventors: Yoshifumi Taniguchi, Kazutoshi Kaji, Yasumitsu Ueki, Shigeto Isakozawa