Abstract: A conveyance hand for holding a conveyed object can include a base, a pad configured to suction the conveyed object, and a first support member fixed to the base and configured to support the pad. First support member can include three or more support members each configured to support the pad.

Abstract: The present invention provides a conveyance apparatus which conveys a substrate to a stage, the apparatus comprising a holding unit configured to hold and rotate the substrate, a detection unit configured to detect a height of the substrate held by the holding unit, a conveyance unit configured to convey the substrate from the holding unit to the stage, and a control unit configured to control, based on a detection result of the detection unit obtained while the holding unit rotates the substrate, conveyance of the substrate by the conveyance unit.

Abstract: The present invention provides a conveyance hand for holding a conveyed object, the conveyance hand including a base, a pad configured to suction the conveyed object, and a first elastic member fixed to the base and configured to support the pad, wherein the first elastic member includes three or more support units each configured to support the pad, and is configured so that a rigidity in a vertical direction is lower than a rigidity in a horizontal direction such that the pad conforms to a shape of the conveyed object.

Abstract: This conveying hand is used for conveying a conveyed object in an adsorbed state with a negative pressure, and comprises a pad having a contact portion that contacts the conveyed object and a concave portion having an internal space that can be evacuated; a base that moves while loading the pad; a first elastic member that movably supports the pad on the base in the direction of gravity of the conveyed object and restricts a movement of the pad on the base in the direction perpendicular to the direction of gravity; and a second elastic member that seals a space communicating with the internal space of the concave portion and movably supports the pad on the base in the direction of gravity.

Abstract: The present invention provides a conveyance apparatus which conveys a substrate to a stage, the apparatus comprising a holding unit configured to hold and rotate the substrate, a detection unit configured to detect a height of the substrate held by the holding unit, a conveyance unit configured to convey the substrate from the holding unit to the stage, and a control unit configured to control, based on a detection result of the detection unit obtained while the holding unit rotates the substrate, conveyance of the substrate by the conveyance unit.

Abstract: This conveying hand is used for conveying a conveyed object in an adsorbed state with a negative pressure, and comprises a pad having a contact portion that contacts the conveyed object and a concave portion having an internal space that can be evacuated; a base that moves while loading the pad; a first elastic member that movably supports the pad on the base in the direction of gravity of the conveyed object and restricts a movement of the pad on the base in the direction perpendicular to the direction of gravity; and a second elastic member that seals a space communicating with the internal space of the concave portion and movably supports the pad on the base in the direction of gravity.