Patents by Inventor Yasunao Oyama

Yasunao Oyama has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Crystallization method and crystallization apparatus
    Patent number: 7875118
    Abstract: A crystallization method includes the steps of melting a crystallized material in a crucible by heating, and growing a crystal by cooling and coagulating the melted material, wherein said melting step includes introducing a predetermined gas into the melted material.
    Type: Grant
    Filed: October 22, 2007
    Date of Patent: January 25, 2011
    Assignee: Canon Kabushiki Kaisha
    Inventors: Yasunao Oyama, Kazutaka Terashima
  • CRYSTALLIZATION METHOD AND CRYSTALLIZATION APPARATUS
    Publication number: 20080134962
    Abstract: A crystallization method includes the steps of melting a crystallized material in a crucible by heating, and growing a crystal by cooling and coagulating the melted material, wherein said melting step includes introducing a predetermined gas into the melted material.
    Type: Application
    Filed: October 22, 2007
    Publication date: June 12, 2008
    Inventors: Yasunao OYAMA, Kazutaka Terashima
  • Crystallization method and crystallization apparatus
    Publication number: 20050241569
    Abstract: A crystallization method includes the steps of melting a crystallized material in a crucible by heating, and growing a crystal by cooling and coagulating the melted material, wherein said melting step includes introducing a predetermined gas into the melted material.
    Type: Application
    Filed: April 4, 2005
    Publication date: November 3, 2005
    Inventors: Yasunao Oyama, Kazutaka Terashiima
  • Optical member for vacuum ultraviolet, and aligner and device manufacture method using same
    Patent number: 6813070
    Abstract: For realizing an optical member for vacuum ultraviolet with little absorption and with a low deliquescence nature and a low cleavage nature, a halide of an alkali metal such as Li, Na, Cs, or the like and a halide of any one of alkaline earth metals and other elements such as Ca, Sr, Ba, Mg, Zn, and the like are mixed in a ratio of 1:1, the mixture is sintered, and a fluoride crystal of AMF3 type perovskite structure is grown. The crystal is processed to fabricate a substrate of an optical member such as a lens, a mirror, a prism, or the like for excimer lasers. Alternatively, the crystal is used as an evaporation source to coat a substrate of an optical member therewith. It is thus feasible to obtain optical members with little absorption in the vacuum ultraviolet region and with an excellent durability.
    Type: Grant
    Filed: February 28, 2001
    Date of Patent: November 2, 2004
    Assignee: Canon Kabushiki Kaisha
    Inventor: Yasunao Oyama
  • Optical member for vacuum ultraviolet, and aligner and device manufacture method using same
    Publication number: 20010053017
    Abstract: For realizing an optical member for vacuum ultraviolet with little absorption and with a low deliquescence nature and a low cleavage nature, a halide of an alkali metal such as Li, Na, Cs, or the like and a halide of any one of alkaline earth metals and other elements such as Ca, Sr, Ba, Mg, Zn, and the like are mixed in a ratio of 1:1, the mixture is sintered, and a fluoride crystal of AMF3 type perovskite structure is grown. The crystal is processed to fabricate a substrate of an optical member such as a lens, a mirror, a prism, or the like for excimer lasers. Alternatively, the crystal is used as an evaporation source to coat a substrate of an optical member therewith. It is thus feasible to obtain optical members with little absorption in the vacuum ultraviolet region and with an excellent durability.
    Type: Application
    Filed: February 28, 2001
    Publication date: December 20, 2001
    Inventor: Yasunao Oyama