Abstract: An unprocessed substrate is conveyed to a film-processing chamber at the same time a processed substrate is conveyed to a substrate preparation chamber, reducing the substrate processing cycle, thereby increasing the yield per unit time. The substrate preparation chamber has a two-tiered structure for receiving processed substrates and unprocessed substrates. A two-tiered transfer robot allows the substrates to be removed or placed into the preparation and process chambers at the same time, thus decreasing the cycle time for processing a substrate.

Abstract: Throughput is increased, the footprint is reduced, heating may be carried out in a short time, and variations in the temperature of the substrate surface may be reduced. A heating chamber 47 for heating the substrate is formed as an upper level of a load/lock chamber 13, and a cooling chamber 48 for cooling the substrate is formed as a lower level of the load/lock chamber 13. An upper heater 51 and a lower heater 56 are formed above and below the heating chamber 47. A shower plate 52 is located between the upper heater 51 and the lower heater 56. A gas heating space 50 is located between the upper heater 51 and the shower plate 52. An N2 gas introducer 42 is connected to the gas heating space 50, such that N2 gas is introduced into the gas heating space 50. The N2 gas introduced from the N2 gas introducer 42 is heated in the gas heating space 50 and is then supplied to the substrate W in the form of a shower via the shower plate 52.

Abstract: Equipment for management of terminal identification numbers in a communication system, including a center and a plurality of terminals connected to the center. Identification numbers of respective terminals registered in advance are attached to data communicating between the center and the respective terminals.

Abstract: A key telephone system including a key service unit, a plurality of key telephone station sets which are connected via speech lines for transmission of speech signals and via data lines for transmission of data, and a device provided at the key service unit for sending a predetermined discrimination signal to a selected key telephone station set via an associated speech line, whereby the key service unit sends key telephone station set information to the plurality of key telephone station set via the data lines, and each of the plurality of key telephone station sets derives its own key telephone station set information from the key telephone station set information sent via the data lines, on the basis of the discrimination signal sent via the speech line.

Abstract: A telephone set which has a hands-free mode of operation is disclosed. The telephone set includes a telephone circuit connector to a handset and a hands-free circuit connected to a loudspeaker. A hook switch is mechanically operated in accordance with operation of the handset. A semiconductor switch is connected in parallel with the hook switch and is controlled by a control circuit. The telephone circuit or hands-free circuit is selectively connected to a pair of telephone lines through the hook switch or the semiconductor switch.

Abstract: In a circuit for driving a latching relay for use in a telephone set, a capacitor is charged from a battery, and when the capacitor is charged to a predetermined value, the capacitor is disconnected from the battery. Thereafter the latching relay is driven by the discharge current of the capacitor. With this circuit, it is possible to prevent unnecessary consumption of the battery.

Abstract: An output voltage of a first diode deriving out an office line voltage, and an output voltage of a second diode deriving out the voltage of a back-up battery are combined and then smoothed by a smoothing capacitor. The smoothed voltage is supplied to a control circuit. A voltage limiting circuit is connected to the input side of the first limiter for limiting the upper limit of the smoothed voltage. A switch circuit is provided which is rendered conductive at the time of talking and the at the time of sending out a dial pulse for combining the office line voltage with the combined voltage. A voltage limiting circuit is also provided which is enabled only at the time of talking and at the time of sending out a dial pulse for limiting the upper limit of the combined voltage.

Abstract: A telephone apparatus having the standard ten digit keys and two special keys, and in the handset the conventional switchhook. By manual operation of the two special keys and the switchhook the apparatus can be operated in any one of a plurality of modes, at least some causing transmission of stored sequences of digits in response to entry of an abbreviated address or in causing redialing. In one mode data signals are produced and transmitted in response to not only the digit keys but also the special keys as well. A controller operates the apparatus and is connected to a dial sender which converts the data signals into a multi-frequency signal which is transmitted by a telephone network to a repeater station.

Abstract: A terminal interface device comprises in-service detector connected to a plurality of CO lines leading to a main unit in a key telephone system and also connected to a terminal unit having a CO line interface, for detecting the in-service state of the respective lines, that is, whether the CO line is currently being used by the terminal unit and for sending an in-service signal indicative of the detected in-service state to the main unit of the system, and a switch controllably operated by a switching control signal generated from the main unit on the basis of the in-service signal and a signal indicative of the state of the CO lines in the main unit to connect one of the plural lines to the terminal unit.

Abstract: A telephone apparatus which can input character/symbol data. The apparatus has a keyboard including a plurality of numeral keys each assigned to characters/symbols, a mode change key for switching numerical mode to character/symbol mode, or vice versa and a special key for executing a predetermined sequence. After the apparatus has been set to the character/symbol mode, the numeral keys assigned for the characters/symbols and the special key are operated in the predetermined sequence, thereby inputting character/symbol data. The data are applied to a electronic calculator CPU, are outputted in the form of character/symbol pattern signals from a character generator, and are displayed by a display section in the predetermined sequence.

Abstract: The display device for a telephone set is designed to be capable of storing in advance the telephone number, person's name, company name, etc. of any desired (one or more) party (subscriber) through the numeric data input means and character data input means which typically use the dial keys of the telephone set, and proper software keys, recognizing the special dial operation made by the user via the specific software keys for telephoning, checking the memory whether the data corresponding to the dialed number is stored, reading the data from the memory if stored, and displaying in the display unit preferably giving the priority to the character data showing the name, company name, etc.