Abstract: A method of producing a group III nitride such as aluminum nitride, comprising the step of reacting a group III halide gas such as aluminum trichloride gas with a nitrogen source gas such as ammonia gas in a growth chamber to grow a group III nitride on a substrate held in the growth chamber, wherein the method further comprises premixing together the group III halide gas and the nitrogen source gas to obtain a mixed gas and then introducing the mixed gas into the growth chamber without forming a deposit in the mixed gas substantially to be reacted each other. For the growth of a group III nitride such as an aluminum-based group III nitride by HVPE, there are provided a method of producing the group III nitride having as high quality as that obtained by the method of the prior art at a high yield and an apparatus used in the method.

Abstract: A method of producing a group III nitride such as aluminum nitride, comprising the step of reacting a group III halide gas such as aluminum trichloride gas with a nitrogen source gas such as ammonia gas in a growth chamber to grow a group III nitride on a substrate held in the growth chamber, wherein the method further comprises premixing together the group III halide gas and the nitrogen source gas to obtain a mixed gas and then introducing the mixed gas into the growth chamber without forming a deposit in the mixed gas substantially to be reacted each other. For the growth of a group III nitride such as an aluminum-based group III nitride by HVPE, there are provided a method of producing the group III nitride having as high quality as that obtained by the method of the prior art at a high yield and an apparatus used in the method.

Abstract: There is provided a simple method of producing in a good yield a tetraalkylammonium hydroxide aqueous solution in which the content of metal ions such as alkali metal ions is reduced to an extremely low level.High-purity trialkylamine and high-purity alkyl chloride are reacted with each other in ultrapure water to obtain an extremely high-purity tetraalkylammonium chloride aqueous solution substantially free from metal ions such as alkali metal ions, and then, the tetraalkylammonium chloride aqueous solution is subjected to electrolysis-dialysis in a solution state without drying it into a solid to produce a tetraalkylammonium hydroxide aqueous solution. Thereby, an extremely high-purity tetraalkylammonium hydroxide aqueous solution with little reduction in purity is obtained in a high yield.