Abstract: A method for fabricating an electronic device is provided, and the method comprises the steps of: forming a lower electrode on a substrate; forming a dielectric film on the lower electrode; forming an upper electrode on the dielectric film, the upper electrode including gold (Au); forming a refractory metal layer on at least one of upper or lower surface of the upper electrode, the refractory metal layer having a melting temperature higher than a melting temperature of the upper electrode; forming an insulating film to cover the lower electrode, the dielectric film, the upper electrode, and the refractory metal layer; and dry-etching the insulating film to form an opening therein, the upper electrode or the refractory metal layer being exposed at the opening.

Abstract: A method for fabricating an electronic device is provided, and the method comprises the steps of: forming a lower electrode on a substrate; forming a dielectric film on the lower electrode; forming an upper electrode on the dielectric film, the upper electrode including gold (Au); forming a refractory metal layer on at least one of upper or lower surface of the upper electrode, the refractory metal layer having a melting temperature higher than a melting temperature of the upper electrode; forming an insulating film to cover the lower electrode, the dielectric film, the upper electrode, and the refractory metal layer; and dry-etching the insulating film to form an opening therein, the upper electrode or the refractory metal layer being exposed at the opening.

Abstract: There are contained the steps of forming a plurality of semiconductor elements on surface sides of a plurality of operational unit areas defined on a semiconductor substrate respectively, then connecting the semiconductor elements only in the operational unit areas by wirings, and then forming recesses from the back side of the semiconductor substrate in the situation that a connection layer for connecting mechanically the semiconductor elements only in the operational unit areas is formed on the surface side of the semiconductor substrate, whereby the semiconductor substrate is separated between the semiconductor elements. Accordingly, there is provided a method of manufacturing a semiconductor device having a plurality of semiconductor elements, that is capable of preventing electrical interference between a plurality of semiconductor elements that are connected mutually via wirings and also suppressing variation a width of a recess that separates respective semiconductor elements.