Patents by Inventor Yasunori Takasugi
Yasunori Takasugi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11791130Abstract: The objective of the present invention is to reduce differences between individual electron beam observation devices accurately by means of image correction.Type: GrantFiled: January 23, 2019Date of Patent: October 17, 2023Assignee: Hitachi High-Tech CorporationInventors: Koichi Hamada, Megumi Kimura, Momoyo Enyama, Ryou Yumiba, Makoto Sakakibara, Kei Sakai, Satoru Yamaguchi, Katsumi Setoguchi, Masumi Shirai, Yasunori Takasugi
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Publication number: 20230317406Abstract: A charged particle beam system that improves throughput by applying an approximate expression created using a wafer to be actually measured is provided.Type: ApplicationFiled: March 29, 2023Publication date: October 5, 2023Inventors: Yuto KAWASHIMA, Satoru YAMAGUCHI, Yasunori TAKASUGI
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Publication number: 20220051868Abstract: The objective of the present invention is to reduce differences between individual electron beam observation devices accurately by means of image correction.Type: ApplicationFiled: January 23, 2019Publication date: February 17, 2022Inventors: Koichi HAMADA, Megumi KIMURA, Momoyo ENYAMA, Ryou YUMIBA, Makoto SAKAKIBARA, Kei SAKAI, Satoru YAMAGUCHI, Katsumi SETOGUCHI, Masumi SHIRAI, Yasunori TAKASUGI
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Patent number: 10984980Abstract: The objective of the present invention is to provide a charged particle beam device for setting, from an image of a trench-like groove or a pit, device conditions for finding a hole or the like provided in the trench or the pit, or measuring a hole or the like provided inside the trench or the like with high accuracy. In the present invention, a charged particle beam device comprises: a deflector for causing a charged particle beam emitted from a charged particle source to perform a scan; a detector for detecting a charged particle obtained on the basis of the scanning of the charged particle beam; and a computation processing device for generating an image on the basis of the output of the detector.Type: GrantFiled: January 29, 2016Date of Patent: April 20, 2021Assignee: Hitachi High-Tech CorporationInventors: Kei Sakai, Satoru Yamaguchi, Hideki Itai, Yasunori Takasugi, Kumiko Shimizu
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Patent number: 10976536Abstract: An image forming device is provided that is capable of forming a proper integrated signal even when an image or a signal waveform is acquired from a pattern having the possibility of preventing proper matching, such as a repetition pattern, a shrinking pattern, and the like. In particular, the image forming device forms an integrated image by integrating a plurality of image signals and is provided with: a matching processing section that performs a matching process between the plurality of image signals; an image integration section that integrates the plurality of image signals for which positioning has been performed by the matching processing section; and a periodicity determination section that determines a periodicity of a pattern contained in the image signals. The matching processing section varies a size of an image signal area for the matching in accordance with a determination by the periodicity determination section.Type: GrantFiled: March 3, 2020Date of Patent: April 13, 2021Assignee: Hitachi High-Tech CorporationInventors: Yasunori Takasugi, Kei Sakai, Satoru Yamaguchi, Kazuyuki Hirao
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Publication number: 20200201019Abstract: An image forming device is provided that is capable of forming a proper integrated signal even when an image or a signal waveform is acquired from a pattern having the possibility of preventing proper matching, such as a repetition pattern, a shrinking pattern, and the like. In particular, the image forming device forms an integrated image by integrating a plurality of image signals and is provided with: a matching processing section that performs a matching process between the plurality of image signals; an image integration section that integrates the plurality of image signals for which positioning has been performed by the matching processing section; and a periodicity determination section that determines a periodicity of a pattern contained in the image signals. The matching processing section varies a size of an image signal area for the matching in accordance with a determination by the periodicity determination section.Type: ApplicationFiled: March 3, 2020Publication date: June 25, 2020Inventors: Yasunori TAKASUGI, Kei SAKAI, Satoru YAMAGUCHI, Kazuyuki HIRAO
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Patent number: 10665420Abstract: Provided is a charged particle beam apparatus, aiming at obtaining an image and the like focused on the sample surface and the bottom while preventing the visual field deviation occurred when focusing on the sample surface and the bottom respectively. The charged particle beam apparatus forms a first image (301), which is based on detection of the first energy charged particles, based on an irradiation with a beam whose focus is adjusted on a sample surface side, forms a second image (304) which is based on detection of second energy charged particles having a relatively higher energy than the first energy and a third image (303) which is based on the detection of the first energy charged particles, based on the irradiation with a beam whose focus is adjusted on a bottom side of a pattern included in the sample, acquires a deviation between the first image and the third image, and composes the first image and the second image so as to correct the deviation.Type: GrantFiled: March 4, 2019Date of Patent: May 26, 2020Assignee: Hitachi High-Technologies CorporationInventors: Yasunori Takasugi, Satoru Yamaguchi, Kei Sakai, Hideki Itai, Yoshinori Momonoi, Toshimasa Kameda, Yoshihiro Kimura
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Patent number: 10620421Abstract: An image forming device is provided that is capable of forming a proper integrated signal even when an image or a signal waveform is acquired from a pattern having the possibility of preventing proper matching, such as a repetition pattern, a shrinking pattern, and the like. In particular, the image forming device forms an integrated image by integrating a plurality of image signals and is provided with: a matching processing section that performs a matching process between the plurality of image signals; an image integration section that integrates the plurality of image signals for which positioning has been performed by the matching processing section; and a periodicity determination section that determines a periodicity of a pattern contained in the image signals. The matching processing section varies a size of an image signal area for the matching in accordance with a determination by the periodicity determination section.Type: GrantFiled: December 17, 2018Date of Patent: April 14, 2020Assignee: Hitachi High-Technologies CorporationInventors: Yasunori Takasugi, Kei Sakai, Satoru Yamaguchi, Kazuyuki Hirao
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Publication number: 20190295815Abstract: Provided is a charged particle beam apparatus, aiming at obtaining an image and the like focused on the sample surface and the bottom while preventing the visual field deviation occurred when focusing on the sample surface and the bottom respectively. The charged particle beam apparatus forms a first image (301), which is based on detection of the first energy charged particles, based on an irradiation with a beam whose focus is adjusted on a sample surface side, forms a second image (304) which is based on detection of second energy charged particles having a relatively higher energy than the first energy and a third image (303) which is based on the detection of the first energy charged particles, based on the irradiation with a beam whose focus is adjusted on a bottom side of a pattern included in the sample, acquires a deviation between the first image and the third image, and composes the first image and the second image so as to correct the deviation.Type: ApplicationFiled: March 4, 2019Publication date: September 26, 2019Inventors: Yasunori TAKASUGI, Satoru YAMAGUCHI, Kei SAKAI, Hideki ITAI, Yoshinori MOMONOI, Toshimasa KAMEDA, Yoshihiro KIMURA
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Patent number: 10417756Abstract: The purpose of the present invention is to provide a pattern measurement apparatus that appropriately assesses patterns formed by patterning methods for forming patterns that do not exist on photomasks. In order to achieve this purpose, the present invention provides a pattern measurement apparatus comprising a processor that measures the dimensions of patterns formed on a sample by using data acquired by irradiating the sample with a beam, wherein the processor extracts pattern coordinate information on the basis of the data acquired by irradiating the sample with a beam, and uses the coordinate information to generate measurement reference data used when performing dimension measurements of the pattern.Type: GrantFiled: January 23, 2015Date of Patent: September 17, 2019Assignee: Hitachi High-Technologies CorporationInventors: Kei Sakai, Satoru Yamaguchi, Kazuyuki Hirao, Yasunori Takasugi
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Publication number: 20190121113Abstract: An image forming device is provided that is capable of forming a proper integrated signal even when an image or a signal waveform is acquired from a pattern having the possibility of preventing proper matching, such as a repetition pattern, a shrinking pattern, and the like. In particular, the image forming device forms an integrated image by integrating a plurality of image signals and is provided with: a matching processing section that performs a matching process between the plurality of image signals; an image integration section that integrates the plurality of image signals for which positioning has been performed by the matching processing section; and a periodicity determination section that determines a periodicity of a pattern contained in the image signals. The matching processing section varies a size of an image signal area for the matching in accordance with a determination by the periodicity determination section.Type: ApplicationFiled: December 17, 2018Publication date: April 25, 2019Inventors: Yasunori TAKASUGI, Kei SAKAI, Satoru YAMAGUCHI, Kazuyuki HIRAO
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Patent number: 10197783Abstract: The purpose of the present invention is to provide an image forming device and the like that is capable of forming a proper integrated signal even when an image or a signal waveform is acquired from a pattern having the possibility of preventing proper matching, such as a repetition pattern, a shrinking pattern, and the like. In order to achieve the purpose, there is proposed an image forming device that forms an integrated image by integrating a plurality of image signals and that is provided with: a matching processing section that performs a matching process between the plurality of image signals; an image integration section that integrates the plurality of image signals for which positioning has been performed by the matching processing section; and a periodicity determination section that determines a periodicity of a pattern contained in the image signals.Type: GrantFiled: February 12, 2013Date of Patent: February 5, 2019Assignee: Hitachi High-Technologies CorporationInventors: Yasunori Takasugi, Kei Sakai, Satoru Yamaguchi, Kazuyuki Hirao
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Publication number: 20190035600Abstract: The objective of the present invention is to provide a charged particle beam device for setting, from an image of a trench-like groove or a pit, device conditions for finding a hole or the like provided in the trench or the pit, or measuring a hole or the like provided inside the trench or the like with high accuracy. In the present invention, a charged particle beam device comprises: a deflector for causing a charged particle beam emitted from a charged particle source to perform a scan; a detector for detecting a charged particle obtained on the basis of the scanning of the charged particle beam; and a computation processing device for generating an image on the basis of the output of the detector.Type: ApplicationFiled: January 29, 2016Publication date: January 31, 2019Applicant: Hitachi High-Technologies CorporationInventors: Kei SAKAI, Satoru YAMAGUCHI, Hideki ITAI, Yasunori TAKASUGI, Kumiko SHIMIZU
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Publication number: 20180012349Abstract: The purpose of the present invention is to provide a pattern measurement apparatus that appropriately assesses patterns formed by patterning methods for forming patterns that do not exist on photomasks. In order to achieve this purpose, the present invention provides a pattern measurement apparatus comprising a processor that measures the dimensions of patterns formed on a sample by using data acquired by irradiating the sample with a beam, wherein the processor extracts pattern coordinate information on the basis of the data acquired by irradiating the sample with a beam, and uses the coordinate information to generate measurement reference data used when performing dimension measurements of the pattern.Type: ApplicationFiled: January 23, 2015Publication date: January 11, 2018Inventors: Kei SAKAI, Satoru YAMAGUCHI, Kazuyuki HIRAO, Yasunori TAKASUGI
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Publication number: 20150002652Abstract: The purpose of the present invention is to provide an image forming device and the like that is capable of forming a proper integrated signal even when an image or a signal waveform is acquired from a pattern having the possibility of preventing proper matching, such as a repetition pattern, a shrinking pattern, and the like. In order to achieve the purpose, there is proposed an image forming device that forms an integrated image by integrating a plurality of image signals and that is provided with: a matching processing section that performs a matching process between the plurality of image signals; an image integration section that integrates the plurality of image signals for which positioning has been performed by the matching processing section; and a periodicity determination section that determines a periodicity of a pattern contained in the image signals.Type: ApplicationFiled: February 12, 2013Publication date: January 1, 2015Applicant: Hitachi High-Technologies CorporationInventors: Yasunori Takasugi, Kei Sakai, Satoru Yamaguchi, Kazuyuki Hirao