Patents by Inventor Yasuo Oogoshi

Yasuo Oogoshi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • High-frequency power supply apparatus for plasma generation apparatus
    Patent number: 6586887
    Abstract: A high-frequency power supply apparatus for a plasma generation apparatus having a modulator for generating an intermittent high-frequency output on the basis of a modulation reference signal and a peak value setting signal, the high-frequency power supply apparatus having: a first control loop for comparing the peak value of the intermittent high-frequency output detected by a peak value detector with a preset peak value of the high-frequency output so that the output controller controls the peak value of the high-frequency output to be the preset peak value; and a second control loop for calculating an average value of the intermittent high-frequency output based on the preset peak setting value and a preset duty ratio setting value and generating a modulation reference signal for controlling the modulator on the basis of the average value of the high-frequency output detected by a monitor and the average value of the high-frequency output.
    Type: Grant
    Filed: March 6, 2002
    Date of Patent: July 1, 2003
    Assignee: Hitachi High-Technologies Corporation
    Inventors: Yasuo Oogoshi, Youji Takahashi, Tadamitsu Kanekiyo, Tsuyoshi Umemoto