Abstract: A film formation apparatus is configured so as to be equipped with: a film-forming chamber for forming a thin film using plasma on a substrate at a film formation position; an abnormal discharge-detecting section for detecting an abnormal discharge of the plasma; an imaging device for imaging abnormal plasma, which is the plasma when an abnormal discharge is detected, or an abnormal substrate surface, which is the substrate surface on which a thin film is formed when an abnormal discharge is detected; and a storage unit for storing the images taken by the imaging device.

Abstract: A high frequency power amplifier includes an amplifying device for amplifying an input high frequency signal, a harmonic reflection circuit for reflecting a harmonic outputted from the amplifying device, and a harmonic generating circuit provided at an input terminal of the amplifying device, the harmonic generating circuit including a divider for dividing an input signal of a fundamental wave into two parts, a harmonic generator for generating a second harmonic from one part of the fundamental wave signal, and a combiner for combining the second harmonic generated from the harmonic generator with the other part of the fundamental wave signal to offer a combined signal to the amplifying device, wherein the harmonic reflection circuit reflects the second harmonic.

Abstract: A high frequency power amplifier includes an amplifying device for amplifying an input high frequency signal, a harmonic reflection circuit for reflecting a harmonic outputted from the amplifying device, and a harmonic generating circuit provided at an input terminal of the amplifying device, the harmonic generating circuit including a divider for dividing an input signal of a fundamental wave into two parts, a harmonic generator for generating a second harmonic from one part of the fundamental wave signal, and a combiner for combining the second harmonic generated from the harmonic generator with the other part of the fundamental wave signal to offer a combined signal to the amplifying device, wherein the harmonic reflection circuit reflects the second harmonic.

Abstract: A distortion compensator that compensates for distortion arising in a main amplifier 10 that amplifies a signal effectively compensates for third order distortion which is unbalanced between the higher frequency band and lower frequency band. An amplitude detector 3 detects the level of a signal subject to amplification and a signal level change direction detection means 7 detects the direction of change in the level of the signal. A signal level change control means 4-8 stores the correspondence between the signal level and the mode of changing the signal in order to compensate for distortion for when the direction of change in the signal level is positive and when it is negative, and controls a signal change means 9 so that the amplitude and phase of the signal is changed in a mode of changing the signal corresponding to the detected direction of change in the signal level and the detected signal level.

Abstract: A distortion compensator that compensates for distortion arising in a main amplifier 10 that amplifies a signal effectively compensates for third order distortion which is unbalanced between the higher frequency band and lower frequency band. An amplitude detector 3 detects the level of a signal subject to amplification and a signal level change direction detection means 7 detects the direction of change in the level of the signal. A signal level change control means 4-8 stores the correspondence between the signal level and the mode of changing the signal in order to compensate for distortion for when the direction of change in the signal level is positive and when it is negative, and controls a signal change means 9 so that the amplitude and phase of the signal is changed in a mode of changing the signal corresponding to the detected direction of change in the signal level and the detected signal level.

Abstract: According to the present invention, there is provided a strain (error) compensation amplifier which realizes miniaturization, loss reduction, and cost reduction. In the strain (error) compensation amplifier, by unifying at least two or more of a power distributor, a first delay unit, a first power synthesizer, a second delay unit, a second power synthesizer, a directional coupler, an isolator and a terminating resistor, the miniaturization, loss reduction, and cost reduction are realized.

Abstract: Excellent compensation of the distortion is realized with a distortion-compensated amplifier device that compensates a distortion that is generated in a main amplifier, through the respective operations of a circuit comprised of a distortion-detecting loop and a distortion-compensating loop and a pre-distortor. In a distortion-detecting loop, the signal is distributed. With respect to one distribution signal, a vector adjuster (2) performs vector adjustment of it and the pre-distortor (3) generates a distortion. A main amplifier (4) amplifies this signal. The resulting amplification signal and the other distribution are composed, whereby a distortion component is detected. In a distortion-compensating loop, that amplification signal and this distortion component are composed to thereby eliminate the distortion component from the amplification signal. In a control part, a distortion component level detecting means (12) detects the levels of the distortion component that is detected.

Abstract: According to the present invention, there is provided a strain compensation amplifier which realizes miniaturization, loss reduction, and cost reduction.

Abstract: A distortion compensating device comprises a 3 dB coupler having four terminals. The first terminal supplies an input signal to be inputted to an amplifier or is supplied with an input signal from an amplifier. The second terminal is associated with a third-order distortion generator for generating a third-order distortion having an amplitude for canceling out a third-order distortion generated by the amplifier depending on the supplied input signal. The third terminal is associated with a phase adjuster for adjusting the phase of the input signal to set the phase difference between the input signal and the third-order distortion generated by the third-order distortion generator to a phase difference for canceling out the third-order distortion generated by the amplifier.