Abstract: Provided is a polishing pad comprising a fiber including organic fiber and a matrix resin holding the fiber, wherein at least the organic fiber is exposed on the work material-side surface thereof at least after dressing. The polishing pad suppresses generation of minute polishing scratches on the work material and allows flat polishing at low load. It in also possible to manage the polishing end point of the work material without generation of polishing scratch with its optical detection system monitoring the polishing state of work material. Thus, for example, it is possible to polish substrates under a small load on the interlayer insulating film and give products superior in flatness in semiconductor device manufacturing processes and thus, the polishing pad according to the invention may be used easily in the next-generation dual damascene method.

Abstract: An electrophotographic member comprising a support, a photoconductive layer formed thereon, and a surface layer formed thereon, said surface layer including or attaching a lubricating agent having a perfluoropolyoxyalkyl or perfluoropolyoxyalkylene group to form an organic surface protective lubricating layer, and a fixing group to be fixed to the surface layer, is excellent in moisture resistance, wear resistance and cleaning properties and thus useful in an electrophotographic apparatus with a long life and high reliability.

Abstract: The photoconductive layer (3) has a triple-layer structure comprised of an upper layer (33) made of amorphous silicon containing germanium and carbon, a middle layer (32) made of amorphous silicon containing germanium, and a lower layer (31) made of amorphous silicon. The upper layer (33) formed between a surface layer (4) and the middle layer (32), and the lower layer (31) formed between the middle layer (32) and a barrier layer (2) serve to reduce the energy difference and the interfacial state between respective layers thus, high electrophotographic sensitivity for a longer wavelength light can be obtained, and sensitivity in the oscillation wavelength of a GaAlAs diode laser improves effectively.