Abstract: A combined valve is constructed by integrating a manual valve operating as a safety mechanism and a pilot valve. When a handle of a knob of the manual valve is in a safety mechanism release position, a valve mechanism can be opened and closed depending on whether or not there is air supply to an operation port. When the handle is in the safety mechanism release position and the valve mechanism is even in a valve open state, the valve mechanism can be forcibly brought to a valve closed state by rotating the handle to a safety mechanism set position. Further, when the handle is in the safety mechanism set position, the valve mechanism can always be kept in the valve closed state irrespective of air supply to the operation port.

Abstract: There is disclosed a flow control valve which regulates a flow rate by determining a stop position of a piston by contact in an opened state, and which enables remote and high-precision flow rate regulation. In a closed state, an urging force of a return spring acts on a piston, bringing a diaphragm into close contact with a valve seat. In this state, when compressed air is supplied into a pilot chamber, moving the piston, the diaphragm is brought out of contact with the valve seat. Then, the piston comes into contact with a nut and the diaphragm is stopped providing a fixed clearance between the diaphragm and the valve seat. An opened state is established. Of course, the nut can be moved to any desired position by means of a serve motor or the like, so that a position at which the piston comes into contact with the nut can be changed.

Abstract: A combined valve is constructed by integrating a manual valve operating as a safety mechanism and a pilot valve. When a handle of a knob of the manual valve is in a safety mechanism release position, a valve mechanism can be opened and closed depending on whether or not there is air supply to an operation port. When the handle is in the safety mechanism release position and the valve mechanism is even in a valve open state, the valve mechanism can be forcibly brought to a valve closed state by rotating the handle to a safety mechanism set position. Further, when the handle is in the safety mechanism set position, the valve mechanism can always be kept in the valve closed state irrespective of air supply to the operation port.

Abstract: There is disclosed a flow control valve which regulates a flow rate by determining a stop position of a piston by contact in an opened state, and which enables remote and high-precision flow rate regulation. In a closed state, an urging force of a return spring acts on a piston, bringing a diaphragm into close contact with a valve seat. In this state, when compressed air is supplied into a pilot chamber, moving the piston, the diaphragm is brought out of contact with the valve seat. Then, the piston comes into contact with a nut and the diaphragm is stopped providing a fixed clearance between the diaphragm and the valve seat. An opened state is established. Of course, the nut can be moved to any desired position by means of a serve motor or the like, so that a position at which the piston comes into contact with the nut can be changed.