Abstract: The invention provides a gas diffusion layer for a fuel cell on which a microporous layer is disposed, which can have lower contact resistance with electrode catalyst layers and improved gas diffusion performance. The gas diffusion layer for a fuel cell of the disclosure has a conductive porous substrate layer and a microporous layer laminated in that order, wherein the microporous layer comprises carbon particles and a water-repellent resin, and has an impregnating portion that impregnates the conductive porous substrate layer and a non-impregnating portion that does not impregnate the conductive porous substrate layer, the thickness of the non-impregnating portion is greater than 0.0 ?m and 20.0 ?m or smaller, and the thickness of the impregnating portion is 29% or lower with respect to the total thickness of the microporous layer.

Abstract: The invention provides a gas diffusion layer for a fuel cell on which a microporous layer is disposed, which can have lower contact resistance with electrode catalyst layers and improved gas diffusion performance. The gas diffusion layer for a fuel cell of the disclosure has a conductive porous substrate layer and a microporous layer laminated in that order, wherein the microporous layer comprises carbon particles and a water-repellent resin, and has an impregnating portion that impregnates the conductive porous substrate layer and a non-impregnating portion that does not impregnate the conductive porous substrate layer, the thickness of the non-impregnating portion is greater than 0.0 ?m and 20.0 ?m or smaller, and the thickness of the impregnating portion is 29% or lower with respect to the total thickness of the microporous layer.

Abstract: Disclosed is a pressure sensor which can achieve both a larger capacitance change and miniaturization of a device than ever before. A pressure sensor comprises a layer constitution in which a dielectric layer is sandwiched by a pair of electrode layers and a pair of insulating substrates in order, and detects pressure based on a capacitance value between electrodes which is varied by a deflection amount of at least one of the dielectric layer and the pair of the electrode layers and, wherein, on each side of the pressure sensor, at least one of the electrode layer and the dielectric layer has concave and convex parts on the surface facing the other layer, and the electrode layer and the dielectric layer are in contact with each other through at least the convex parts of the concave and convex parts.

Abstract: Disclosed is a fuel cell system (100) comprising a solid polymer fuel cell, wherein a cathode off-gas containing moisture which is discharged from a cathode of a fuel cell stack (10) is circulated and supplied back to the cathode. In addition, when flooding occurs in this fuel cell stack (10), an air pump (42), a circulation throttle (44), a supply throttle (46) and a back pressure control valve (38) are controlled for increasing the circulation amount of the cathode off-gas, thereby discharging the excess moisture. Consequently, flooding problems can be resolved in this fuel cell system while surely keeping the electrolyte membrane wet.

Abstract: An angular velocity sensor includes a tuning-fork oscillator having a pair of arms jointed by a trunk, the pair of arms extending in parallel to each other, first and second driving piezoelectric elements arranged only on one surface of the trunk with a gap therebetween in an extending direction of the arms, and angular velocity detecting piezoelectric elements arranged on surfaces of the arms in parallel with the one surface of the trunk on which the first and second piezoelectric elements are arranged.

Abstract: The output of a synchronous detector is made precise by reducing the offset included in the outputs of detecting piezoelectric elements. This is carried out by applying one y-axis direction exciting force to one movable piece from one pair of driving piezoelectric elements and another y-axis direction exciting force to another movable piece from another pair of driving piezoelectric elements.

Abstract: A manufacturing method of semiconductor devices adaptable for use in microelectronics devices such as angular-rate sensors includes the steps of preparing a silicon wafer having a lamination of a p-type silicon substrate and an n-type epitaxial layer as formed thereon, defining on a specified surface of the wafer a plurality of recess portions each having a reduced-thickness portion on the opposite surface side which consists of the epitaxial layer, forming plural through-going holes in each reduced-thickness portion by causing a gel- or oil-like coolant medium made of a thermally conductive material to be disposed in contact with one surface of the reduced-thickness portion of the silicon substrate and by effecting dry etching of certain region from the other surface of the reduced-thickness portion, and thereafter removing the medium. This medium serves to absorb and dissipate heat generated at the reduced-thickness portion during the dry etching.