Abstract: Disclosed is a vacuum valve apparatus comprising a valve head, a motor for driving the valve head, means for checking the position of the valve adapted to issue a first signal upon detecting that the valve head is moved to be within a predetermined valve-closed range, means for checking electric current adapted to issue a second signal when the driving current for the motor is increased to a predetermined value, switching means adapted to cut the driving current supply to the motor upon detecting said second signal, and means for issueing a third signal for confirming the complete closure of the valve when both of the first and the second signals are simultaneously obtained.