Abstract: In an array type capacitance sensor (1), a slit (2b) is provided between each pair of adjacent ones of multiple movable electrodes (6) on a movable-electrode-side substrate (2) so as to extend in parallel with the movable electrodes (6). This allows providing an array type capacitance sensor capable of being produced inexpensively and measuring pressure precisely and stably even on a curved surface.

Abstract: A secondary flow channel of a flow rate measuring device includes: a guide flow channel in which an upstream side communicates with a guide port serving as a first bifurcation point, and a downstream side serves as a second bifurcation point; a first secondary flow channel in which an upstream side is bifurcated from a guide flow channel at the second bifurcation point and formed to be parallel to a primary flow channel, and a downstream side communicates with a discharge port; a second secondary flow channel in which an upstream side is bifurcated from the guide flow channel at the second bifurcation point and formed to cross the primary flow channel; and a detection flow channel in which an upstream side communicates with a downstream side of the second secondary flow channel, a flow rate detecting element is disposed, and a downstream side communicates with the discharge port.

Abstract: In an array type capacitance sensor (1), a slit (2b) is provided between each pair of adjacent ones of multiple movable electrodes (6) on a movable-electrode-side substrate (2) so as to extend in parallel with the movable electrodes (6). This allows providing an array type capacitance sensor capable of being produced inexpensively and measuring pressure precisely and stably even on a curved surface.

Abstract: A secondary flow channel of a flow rate measuring device includes: a guide flow channel in which an upstream side communicates with a guide port serving as a first bifurcation point, and a downstream side serves as a second bifurcation point; a first secondary flow channel in which an upstream side is bifurcated from a guide flow channel at the second bifurcation point and formed to be parallel to a primary flow channel, and a downstream side communicates with a discharge port; a second secondary flow channel in which an upstream side is bifurcated from the guide flow channel at the second bifurcation point and formed to cross the primary flow channel; and a detection flow channel in which an upstream side communicates with a downstream side of the second secondary flow channel, a flow rate detecting element is disposed, and a downstream side communicates with the discharge port.

Abstract: A small-sized pressure sensor having smaller numbers of parts and assembling steps, a simple structure, a high assembly precision, and little dispersion in the operation characteristics, and a method for manufacturing the pressure sensor. The pressure sensor comprises: a base member; a stationary electrode molded so integrally as is exposed from the bottom face of a recess formed in the upper face of the base member; moving electrode receiving portions and molded so integrally in the bottom face of the recess of the base members as are arranged in the periphery of the stationary electrode and as are higher by a predetermined inter-electrode gap than the upper face of the stationary electrode; a moving electrode opposed to the upper face of the stationary electrode through a predetermined inter-electrode gap; and a diaphragm fixed of the open edge portion of the recess of the base member and adhered integrally at the central portion of its lower face to the upper face of the moving electrode.

Abstract: A small-sized pressure sensor having smaller numbers of parts and assembling steps, a simple structure, a high assembly precision, and little dispersion in the operating characteristics, and a method for manufacturing the pressure sensor.

Abstract: A pressure sensor includes a detection unit 1 having capacities C1 and C2 varied by a predetermined external action, a reference detection 2 unvaried by the predetermined external action, a first oscillator 31 and 32 for generating a detection frequency signal according to the capacities C1 and C2 of the detection unit 1, a second oscillator 33 for producing a reference frequency signal according to the capacity of the reference unit 2, and measuring circuits 34, 35, 36 and 37 for measuring the number of the periods of the detection frequency signal within a predetermined period of the reference frequency signal to produce a measured signal. The sensor can minimize a detection error, and directly convert the change of capacity into a pulse signal (digital signal) without convertion into an analog, so that the circuit construction be simplified and realized at a reduced cost.