Abstract: A pressure sensor has a stem in which a pressure introduction hole into which a pressure medium is introduced and a diaphragm deformable according to the pressure of the pressure medium are formed, and a strain detecting element which is arranged on the diaphragm via an insulating film and being configured to output a detection signal according to the deformation of the diaphragm. The strain detecting element is configured to have a portion made of polysilicon. A low doping layer having a higher electrical resistivity than polysilicon and a higher crystallinity than the insulating film is arranged between the insulating film and the strain detecting element.

Abstract: A pressure sensor has a stem in which a pressure introduction hole into which a pressure medium is introduced and a diaphragm deformable according to the pressure of the pressure medium are formed, and a strain detecting element which is arranged on the diaphragm via an insulating film and being configured to output a detection signal according to the deformation of the diaphragm. The strain detecting element is configured to have a portion made of polysilicon. A low doping layer having a higher electrical resistivity than polysilicon and a higher crystallinity than the insulating film is arranged between the insulating film and the strain detecting element.

Abstract: A magnetic tile sensor has a permanent magnet having a surface coated with a magnetic fluid and housed in a hollow portion of a nonmagnetic case, and a magnetic sensing element arranged outside the bottom portion of the case. When the case is tilted or is abruptly moved, the permanent magnet in the case is relatively displaced. The magnetic sensing element detects this displacement. Since the nonmagnetic case is sealed by a cold welding method, workability and reliability can be increased. In addition, a cap having a predetermined weight covers the permanent magnet so that a response characteristic is improved.

Abstract: There is proposed a tilt sensor in which a first permanent magnet having a magnetic fluid adhered to its surface is housed in a nonmagnetic case, a magnetic sensing element is arranged outside a bottom portion of the case, and a second permanent magnet is arranged so as to surround the magnetic sensing element and have polarity directions opposite to those of the first permanent magnet. When the case is tilted at an angle larger than a predetermined angle, the first permanent magnet is instantaneously moved, and the magnet sensing element detects changes in magnetism, thereby detecting a tilt of the case.

Abstract: There is proposed a tilt sensor in which a permanent magnet having a surface coated with a magnetic field is housed in a hollow portion of a nonmagnetic case, and a magnetic sensing element is disposed outside a bottom portion of the case. When the case is tilted at an angle exceeding a predetermined angle, the permanent magnet is greatly moved and the magnetic sensing element detects the movement of the magnet. Furthermore, adverse influences due to magnetic attraction between the permanent magnet and the magnetic sensing element or a surface tension of the magnetic fluid are compensated.

Abstract: A magnetic tilt sensor in which a permanent magnet having a surface coated with a magnetic fluid is housed in a space inside a nonmagnetic case and is freely movable, and a magnetic sensing element is disposed to oppose the space through the case. When the case is tilted, the permanent magnet inside the space is moved to a lower position, and hence magnetism detected by the magnetic sensing element changes, thereby detecting a tilt of the case.