Patents by Inventor Yasushige ABE

Yasushige ABE has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • WAFER CARRIER CLEANING METHOD
    Publication number: 20150053239
    Abstract: According to one embodiment, a wafer carrier cleaning method is provided. The wafer carrier cleaning method includes cleaning a wafer carrier with a chemical solution containing a weak acid that can dissolve metals, and cleaning the wafer carrier cleaned with the chemical solution, with pure water. The weak acid contained in the chemical solution is preferably citric acid that can dissolve heavy metals and does not damage the wafer carrier.
    Type: Application
    Filed: February 28, 2014
    Publication date: February 26, 2015
    Applicant: KABUSHIKI KAISHA TOSHIBA
    Inventors: Yasushige ABE, Hidekazu TANIGUCHI, Masanobu KIBE, Kosuke MIYAMOTO