Abstract: An image pickup apparatus includes: an image pickup element having a plurality of pixels; a drive unit moving the image pickup element; a defective position storage unit storing position data on the image pickup element about a defective pixel contained in the plurality of pixels; an image extraction unit extracting a moving picture regeneration area depending on the position of the image pickup element during capturing an image from a captured image obtained by the image pickup element; and a defect correction unit complementing a defective pixel of a captured image obtained by the image pickup element using image data of captured image obtained by the image pickup element in another position. Moving pictures are formed by continuously outputting captured images in the moving picture regeneration area for which the defect correction unit has complemented the defective pixel.

Abstract: An image pickup apparatus includes: an image pickup element having a plurality of pixels; a drive unit moving the image pickup element; a defective position storage unit storing position data on the image pickup element about a defective pixel contained in the plurality of pixels; an image extraction unit extracting a moving picture regeneration area depending on the position of the image pickup element during capturing an image from a captured image obtained by the image pickup element; and a defect correction unit complementing a defective pixel of a captured image obtained by the image pickup element using image data of captured image obtained by the image pickup element in another position. Moving pictures are formed by continuously outputting captured images in the moving picture regeneration area for which the defect correction unit has complemented the defective pixel.

Abstract: An image data file management system according to the present invention includes a plurality of inspection sections which acquire an image of a subject and acquire various kinds of inspection results by performing image processing with respect to image data of the subject, and an image server which stores respective sets of the image data acquired by the respective inspection sections in association with information of the subject.

Abstract: An image pickup apparatus includes: an image pickup element having a plurality of pixels; a drive unit moving the image pickup element; a defective position storage unit storing position data on the image pickup element about a defective pixel contained in the plurality of pixels; an image extraction unit extracting a moving picture regeneration area depending on the position of the image pickup element during capturing an image from a captured image obtained by the image pickup element; and a defect correction unit complementing a defective pixel of a captured image obtained by the image pickup element using image data of captured image obtained by the image pickup element in another position. Moving pictures are formed by continuously outputting captured images in the moving picture regeneration area for which the defect correction unit has complemented the defective pixel.

Abstract: In an optical device having an objective lens for magnifying an image of a target object and a focusing unit including a laser source for irradiating the target object through the objective lens and a focus detecting light-receiving section for receiving light reflected from the target object, positions in the periphery of the target object are detected by using the laser beam emitted from the laser source of the focusing unit while changing a relative positional relationship between the target object and the objective lens.

Abstract: An image data file management system according to the present invention includes a plurality of inspection sections which acquire an image of a subject and acquire various kinds of inspection results by performing image processing with respect to image data of the subject, and an image server which stores respective sets of the image data acquired by the respective inspection sections in association with information of the subject.

Abstract: A defect detecting apparatus comprising an illuminating unit which irradiates an object with illumination an image sensing unit which senses an image of the object an angle controller which controls an inclination angle of at least one of the illuminating unit and the image sensing unit, an image processor which senses images of the object while the angle controller changes the inclination angle of at least one of the illuminating unit and the image sensing unit and obtains a relationship between each inclination angle and optical information corresponding to the each inclination angle, and a determination unit which determines an image sensing condition suited to observation in accordance with the relationship wherein the angle controller sets the inclination angle of the illuminating unit or the image sensing unit on the basis of a determination result from the determination unit such that the inclination angle matches the image sensing condition.

Abstract: A defect detecting apparatus comprising an illuminating unit which irradiates an object with illumination an image sensing unit which senses an image of the object an angle controller which controls an inclination angle of at least one of the illuminating unit and the image sensing unit, an image processor which senses images of the object while the angle controller changes the inclination angle of at least one of the illuminating unit and the image sensing unit and obtains a relationship between each inclination angle and optical information corresponding to the each inclination angle, and a determination unit which determines an image sensing condition suited to observation in accordance with the relationship wherein the angle controller sets the inclination angle of the illuminating unit or the image sensing unit on the basis of a determination result from the determination unit such that the inclination angle matches the image sensing condition.

Abstract: A confocal microscope has a light source, an optical system, a rotating disk, an image capturing device such as a CCD camera, a subtracting section, a detector, and an adjusting device. The rotating disk has a transparent portion transmitting a light beam emitted from a light source and a light-permeable portion which includes transparent and opaque areas. The image capturing device alternately captures a composite image and a bright field image while the rotating disk is rotating. A subtracting section performs subtraction between a newest captured image and a last captured image, whenever a newest captured image is captured, so as to extract the confocal image. The detector detects at least once whether the captured image is the composite image or the bright field image. The adjusting device adjusts the plus/minus sign of the confocal image on the basis of a result detected by the detector.

Abstract: In an optical device having an objective lens for magnifying an image of a target object and a focusing unit including a laser source for irradiating the target object through the objective lens and a focus detecting light-receiving section for receiving light reflected from the target object, positions in the periphery of the target object are detected by using the laser beam emitted from the laser source of the focusing unit while changing a relative positional relationship between the target object and the objective lens.

Abstract: A position detecting apparatus for a semiconductor wafer includes a wafer worktable supported by an X-Y stage. The worktable is rotatable about an axis on a reference center for positioning the wafer. The apparatus also includes a photoelectric sensor arranged to correspond to the edge region of the wafer on the worktable. The photoelectric sensor includes an infrared-ray emitting LED and a collimator lens for applying a parallel luminous flux to the wafer edge region, and a photo diode facing the collimator lens through the wafer edge region, all arranged on the optical axis. The photo diode outputs a signal having a level corresponding to a received light quantity. The photoelectric sensor also includes a light shielding slit plate having a slit arranged on the optical axis.