Abstract: Provision of a probe device, a processing device and a probe test capable of performing an efficient wafer probe test. A probe device, comprising a plurality of measuring stages to which a plurality of probe cards for inspecting semiconductor wafers are connected, respectively; a first conveying portion for conveying a semiconductor wafer to a first measuring stage to which a first probe card is connected; a first inspection control portion for controlling the inspection of the semiconductor wafer by the first probe card; a receiving portion for receiving stage information including information showing nonuse of the first measuring stage from a processing device; a second conveying portion for conveying the semiconductor wafer to a second measuring stage, to which a second probe card different from the first probe card is connected, according to the received stage information; and a second inspection control portion for controlling the inspection of the semiconductor wafer by the second probe card.

Abstract: Provision of a probe device, a processing device and a probe test capable of performing an efficient wafer probe test. A probe device, comprising a plurality of measuring stages to which a plurality of probe cards for inspecting semiconductor wafers are connected, respectively; a first conveying portion for conveying a semiconductor wafer to a first measuring stage to which a first probe card is connected; a first inspection control portion for controlling the inspection of the semiconductor wafer by the first probe card; a receiving portion for receiving stage information including information showing nonuse of the first measuring stage from a processing device; a second conveying portion for conveying the semiconductor wafer to a second measuring stage, to which a second probe card different from the first probe card is connected, according to the received stage information; and a second inspection control portion for controlling the inspection of the semiconductor wafer by the second probe card.

Abstract: A defect detection system includes a data acquiring section that acquires time series data of device parameter of each manufacturing device including an exposure device, and information on defect distribution in an area with a size smaller than a chip area size, a pattern classifying section that assembles the information on the defect distribution in units of shot or chip areas, and classifies the distributions to a defect pattern, a feature quantity calculating section that processes the time series data and calculates a feature quantity, a significant difference test section that calculates occurrence frequency distributions of the shot or chip area wherein the defect pattern to the feature quantity exists and does not exist, respectively, and determines the presence/absence of significant difference between the frequency distributions, and a defect detecting section that detects the device parameter corresponding to the feature quantity as the cause of defect of the defect pattern.

Abstract: A defect detection system includes a data acquiring section that acquires time series data of device parameter of each manufacturing device including an exposure device, and information on defect distribution in an area with a size smaller than a chip area size, a pattern classifying section that assembles the information on the defect distribution in units of shot or chip areas, and classifies the distributions to a defect pattern, a feature quantity calculating section that processes the time series data and calculates a feature quantity, a significant difference test section that calculates occurrence frequency distributions of the shot or chip area wherein the defect pattern to the feature quantity exists and does not exist, respectively, and determines the presence/absence of significant difference between the frequency distributions, and a defect detecting section that detects the device parameter corresponding to the feature quantity as the cause of defect of the defect pattern.