Patents by Inventor Yasutakaq Ito

Yasutakaq Ito has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Ceramic heater
    Publication number: 20040016746
    Abstract: An objective of the present invention is to provide a ceramic heater making it possible to heat an object to be heated, such as a silicon wafer, uniformly. The ceramic heater of the present invention is a ceramic heater wherein a heating element is formed on a surface of a ceramic plate or inside the ceramic plate, wherein: a bottomed hole is made, being directed from the opposite side to a heating surface for heating an object to be heated, toward the heating surface; the bottom of said bottomed hole is formed relatively nearer to the heating surface than the heating element; and a temperature-measuring element is set up in this bottomed hole.
    Type: Application
    Filed: July 15, 2003
    Publication date: January 29, 2004
    Applicant: IBIDEN CO., LTD.
    Inventors: Yasutakaq Ito, Masakazu Furukawa, Yasuji Hiramatsu