Patents by Inventor Yasuto Otani

Yasuto Otani has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of forming a thin film pattern with a trapezoidal cross section
    Patent number: 5127989
    Abstract: The present invention provides a method of forming a thin film pattern with a trapezoidal cross section. In this method, a resist pattern with an inverted-trapezoidal cross section is formed on a thin film. Using the resist pattern with the inverted-trapezoidal cross section as a mask, the thin film is dry-etched. A resist pattern is left with the resist pattern used as a mask. The resist pattern has a trapezoidal cross section.
    Type: Grant
    Filed: May 13, 1991
    Date of Patent: July 7, 1992
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Hiroshi Haraguchi, Hitoshi Tsuji, Yasuto Otani, Kuniaki Kumamaru