Abstract: A rotational drive device includes a first rotator configured to rotate with respect to a stator, a plurality of second rotators configured to rotate with respect to the first rotator, a plurality of drivers configured to rotatably drive the respective second rotators, and a plurality of driver controllers configured to rotate integrally with the first rotator and to control rotation of the drivers, respectively, the respective driver controllers being connected to one another by a communication network.

Abstract: A substrate processing apparatus includes a processing chamber configured to process a substrate by using a processing gas; a rotary table that is rotatably provided in the processing chamber; a stage on which the substrate is to be placed and that is configured to be rotatable relative to the rotary table at a position spaced apart from a center of rotation of the rotary table, a lift pin configured to be displaced relative to the stage to raise and lower the substrate; and a housing configured to house the lift pin when the lift pin is not unexposed from the stage. The lift pin and the housing have a closing structure that closes a gap between the lift pin and the housing.

Abstract: A battery unit includes at least one battery module, a cooling device configured to deliver a cooling gas configured to cool the battery module to the battery module, and a junction board mounted with a wiring component configured to electrically connect the battery module and an external device and allow a charging power and/or a discharging power of the battery module to flow. The junction board is disposed above the cooling device at a position where at least a part of the junction board overlaps the cooling device when viewed from an upper-lower direction.

Abstract: This vehicle cooling device includes a duct communicating with a heating element disposed in a vehicle, an opening provided in the duct, positioned below a seat surface part of a seat disposed above a floor panel, and opening to a passenger compartment, and a fan supplying air suctioned into the duct from the opening to the heating element, in which the opening is positioned on a vehicle-body rear side with respect to a seat fixing part on a vehicle-body front side among seat fixing parts for fixing the seat to the floor panel in a state in which it is disposed on a vehicle-body rear side of a front end of the seat surface part.

Abstract: A rotational drive device includes a first rotator configured to rotate with respect to a stator, a plurality of second rotators configured to rotate with respect to the first rotator, a plurality of drivers configured to rotatably drive the respective second rotators, and a plurality of driver controllers configured to rotate integrally with the first rotator and to control rotation of the drivers, respectively, the respective driver controllers being connected to one another by a communication network.

Abstract: A robot hand having a suction holding unit on one face side holds a plate-shaped work by suction. An outer circumferential edge of the plate-shaped work is held, without contact with a surface of the plate-shaped work, by an outer circumference holding unit provided on the other face side. The robot hand can be used to hold the plate-shaped work yet to be worked by the suction holding unit, and to hold the plate-shaped work having been worked by the outer circumference holding unit. This prevents working debris from being deposited on the plate-shaped work yet to be worked and prevents defective working from occurring. In addition, since the plate-shaped work having been worked is held by the outer circumference holding unit, the robot hand does not make contact with surfaces of the worked plate-shaped work, and, accordingly, no contact marks are formed on the surfaces of the work.

Abstract: A robot hand having a suction holding unit on one face side holds a plate-shaped work by suction. An outer circumferential edge of the plate-shaped work is held, without contact with a surface of the plate-shaped work, by an outer circumference holding unit provided on the other face side. The robot hand can be used to hold the plate-shaped work yet to be worked by the suction holding unit, and to hold the plate-shaped work having been worked by the outer circumference holding unit. This prevents working debris from being deposited on the plate-shaped work yet to be worked and prevents defective working from occurring. In addition, since the plate-shaped work having been worked is held by the outer circumference holding unit, the robot hand does not make contact with surfaces of the worked plate-shaped work, and, accordingly, no contact marks are formed on the surfaces of the work.