Patents by Inventor Yasutoshi Takada
Yasutoshi Takada has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 9429850Abstract: A laser device includes: a laser light output unit that outputs a fundamental wave laser light; a wavelength conversion unit that performs wavelength conversion of the fundamental wave laser light and outputs a converted laser light; an output detector that detects a power of the converted laser light; a power feedback circuit that controls the power of the fundamental wave laser light such that the power of the converted laser light is in constant; a phase matching adjustment configuration that adjusts a quantity of state at the wavelength conversion optical element; and a phase matching control circuit that controls an operation the phase matching adjustment configuration, wherein in a state that the power of the converted laser light is controlled in constant, the phase matching control circuit adjust the quantity of state in a predetermined range such that the power of the fundamental wave laser light is minimized.Type: GrantFiled: March 5, 2013Date of Patent: August 30, 2016Assignee: NIKON CORPORATIONInventor: Yasutoshi Takada
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Patent number: 9348233Abstract: A laser device includes: a laser light output unit that outputs a fundamental wave laser light; a wavelength conversion unit that performs wavelength conversion of the fundamental wave laser light and outputs a converted laser light; an output detector that detects a power of the converted laser light; a power feedback circuit that controls the power of the fundamental wave laser light such that the power of the converted laser light is in constant; a phase matching adjustment configuration that adjusts a quantity of state at the wavelength conversion optical element; and a phase matching control circuit that controls an operation the phase matching adjustment configuration, wherein in a state that the power of the converted laser light is controlled in constant, the phase matching control circuit adjust the quantity of state in a predetermined range such that the power of the fundamental wave laser light is minimized.Type: GrantFiled: March 5, 2013Date of Patent: May 24, 2016Assignee: NIKON CORPORATIONInventor: Yasutoshi Takada
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Patent number: 9172204Abstract: A laser device includes: a signal light source that outputs seed light; an electro-optic modulator that chops a portion of the seed light outputted from the signal light source and outputs signal light; an optical amplifier that amplifies the signal light outputted from the electro-optic modulator; a wavelength conversion optical element that wavelength converts the signal light amplified by the optical amplifier; a converted light detector that detects the signal light that has been wavelength converted by the wavelength conversion optical element; and an EU control unit that controls the operation of the electro-optic modulator, wherein the EU control unit is adapted, in the state in which the seed light is being outputted, to adjust bias voltage of the electro-optic modulator on the basis of the applied voltage when the intensity of the signal light after wavelength conversion detected by the converted light detector becomes substantially maximum.Type: GrantFiled: February 10, 2012Date of Patent: October 27, 2015Assignee: NIKON CORPORATIONInventors: Akira Tokuhisa, Yasutoshi Takada
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Patent number: 9160132Abstract: The present invention greatly reduces the likelihood that fiber fusion will occur. A laser apparatus comprises an excitation light source and an optical amplifier unit, which optically amplifies by receiving excitation light that is output from the excitation light source and that transits an optical fiber. A monitor unit monitors the power level of the excitation light transmitted from the excitation light source to the optical amplifier unit side via the optical fiber.Type: GrantFiled: February 17, 2011Date of Patent: October 13, 2015Assignee: NIKON CORPORATIONInventors: Yasutoshi Takada, Akira Tokuhisa
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Patent number: 9153934Abstract: A fundamental wavelength light generating unit generates light of a fundamental wavelength in accordance with an output wavelength instruction signal. An optical amplifier unit amplifies the light of the fundamental wavelength. A wavelength converting part includes nonlinear optical crystals that each perform wavelength conversion and temperature regulators that each regulate the temperature of the corresponding nonlinear optical crystal, wherein the wavelength converting part converts the light amplified by the optical amplifier unit to light of the wavelength indicated by the output wavelength instruction signal. A storage unit stores correspondence information that indicates a correspondence relationship between the wavelength of the output light and the temperature of each of the nonlinear optical crystals based on the corresponding wavelength.Type: GrantFiled: March 30, 2011Date of Patent: October 6, 2015Assignee: NIKON CORPORATIONInventors: Yasutoshi Takada, Akira Tokuhisa
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Patent number: 9122018Abstract: Grooves (22, 23) for containing an optical fiber and five recesses (24) for containing the optical components for an optical fiber amplifier are provided in the surface of a substrate (21). An optical fiber fitted in a groove (23a) for containing the optical fiber and introduced to the substrate (21) is passed through a groove (22a) for containing the optical fiber and fitted in a groove (22) for containing the optical fiber, thence passed through a groove (22b) for containing the optical fiber and introduced to the outside of the substrate (21). In the recess (24) for containing the optical component for an optical fiber amplifier, an optical component such as a photocoupler is fitted and coupled with the optical fiber. Light such as pumping light is passed through an optical fiber contained in the groove (23) for containing the optical fiber and introduced to an optical component such as a photocoupler.Type: GrantFiled: January 14, 2009Date of Patent: September 1, 2015Assignee: NIKON CORPORATIONInventors: Yoshinori Oshita, Yasutoshi Takada
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Patent number: 9083151Abstract: When the laser light source is caused to standby, the temperatures of semiconductor lasers are changed by approximately 3° C. from the temperature when the laser light source is always being used. With a temperature change of approximately 3° C., the wavelengths of the laser light generated by the semiconductor lasers change approximately 0.3 nm. This change hardly has any effect at all on optical fiber amplifiers, but the conversion efficiencies at the respective wavelength conversion elements of the wavelength conversion optical system change, and, particularly, deep ultraviolet light is hardly generated at all any longer. Therefore, even while the laser light has been made incident to the wavelength conversion optical system, there is no longer damaging of the wavelength conversion elements. Therefore, it is possible to provide a laser light source standby method that is able to shorten the start up time of the laser light source.Type: GrantFiled: June 7, 2011Date of Patent: July 14, 2015Assignee: NIKON CORPORATIONInventors: Akira Tokuhisa, Yasutoshi Takada
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Publication number: 20150131068Abstract: A laser device includes: a laser light output unit that outputs a fundamental wave laser light; a wavelength conversion unit that performs wavelength conversion of the fundamental wave laser light and outputs a converted laser light; an output detector that detects a power of the converted laser light; a power feedback circuit that controls the power of the fundamental wave laser light such that the power of the converted laser light is in constant; a phase matching adjustment configuration that adjusts a quantity of state at the wavelength conversion optical element; and a phase matching control circuit that controls an operation the phase matching adjustment configuration, wherein in a state that the power of the converted laser light is controlled in constant, the phase matching control circuit adjust the quantity of state in a predetermined range such that the power of the fundamental wave laser light is minimized.Type: ApplicationFiled: March 5, 2013Publication date: May 14, 2015Inventor: Yasutoshi Takada
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Publication number: 20140064307Abstract: A laser device includes a partially reflective mirror for separating laser light into monitor light and output light, a light output monitor device for detecting the intensity of the monitor light from the partially reflective mirror, a controller for controlling the intensity of the output light from the partially reflective mirror by controlling the output of a laser light source on the basis of a detection value of the light output monitor device, and a power meter device for detecting the intensity of the output light from the partially reflective mirror during a predetermined calibration time period, wherein the controller calibrates the output of the light output monitor device on the basis of a detection value of the power meter device.Type: ApplicationFiled: November 7, 2013Publication date: March 6, 2014Applicant: NIKON CORPORATIONInventors: Yasutoshi TAKADA, Yoshiro TANI
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Publication number: 20140036944Abstract: A laser device includes: a signal light source that outputs seed light; an electro-optic modulator that chops a portion of the seed light outputted from the signal light source and outputs signal light; an optical amplifier that amplifies the signal light outputted from the electro-optic modulator; a wavelength conversion optical element that wavelength converts the signal light amplified by the optical amplifier; a converted light detector that detects the signal light that has been wavelength converted by the wavelength conversion optical element; and an EU control unit that controls the operation of the electro-optic modulator, wherein the EU control unit is adapted, in the state in which the seed light is being outputted, to adjust bias voltage of the electro-optic modulator on the basis of the applied voltage when the intensity of the signal light after wavelength conversion detected by the converted light detector becomes substantially maximum.Type: ApplicationFiled: February 10, 2012Publication date: February 6, 2014Applicant: NIKON CORPORATIONInventors: Akira Tokuhisa, Yasutoshi Takada
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Patent number: 8573790Abstract: An optical element that includes a substrate having two surfaces, each of the surfaces having a micro-relief structure that includes numerous fine protrusions, and a film that includes one or more layers including a metal layer and that is formed on one of the micro-relief structures.Type: GrantFiled: October 6, 2010Date of Patent: November 5, 2013Assignee: Nikon CorporationInventors: Yutaka Hamamura, Kiyoshi Kadomatsu, Yasutoshi Takada, Yoshiro Tani
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Publication number: 20120287953Abstract: A laser device includes a partially reflective mirror for separating laser light into monitor light and output light, a light output monitor device for detecting the intensity of the monitor light from the partially reflective mirror, a controller for controlling the intensity of the output light from the partially reflective mirror by controlling the output of a laser light source on the basis of a detection value of the light output monitor device, and a power meter device for detecting the intensity of the output light from the partially reflective mirror during a predetermined calibration time period, wherein the controller calibrates the output of the light output monitor device on the basis of a detection value of the power meter device.Type: ApplicationFiled: July 20, 2012Publication date: November 15, 2012Applicant: NIKON CORPORATIONInventors: Yasutoshi TAKADA, Yoshiro Tani
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Publication number: 20110268142Abstract: When the laser light source is caused to standby, the temperatures of semiconductor lasers are changed by approximately 3° C. from the temperature when the laser light source is always being used. With a temperature change of approximately 3° C., the wavelengths of the laser light generated by the semiconductor lasers change approximately 0.3 nm. This change hardly has any effect at all on optical fiber amplifiers, but the conversion efficiencies at the respective wavelength conversion elements of the wavelength conversion optical system change, and, particularly, deep ultraviolet light is hardly generated at all any longer. Therefore, even while the laser light has been made incident to the wavelength conversion optical system, there is no longer damaging of the wavelength conversion elements. Therefore, it is possible to provide a laser light source standby method that is able to shorten the start up time of the laser light source.Type: ApplicationFiled: June 7, 2011Publication date: November 3, 2011Applicant: NIKON CORPORATIONInventors: Akira Tokuhisa, Yasutoshi Takada
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Publication number: 20110245898Abstract: A fundamental wavelength light generating unit generates light of a fundamental wavelength in accordance with an output wavelength instruction signal. An optical amplifier unit amplifies the light of the fundamental wavelength. A wavelength converting part includes nonlinear optical crystals that each perform wavelength conversion and temperature regulators that each regulate the temperature of the corresponding nonlinear optical crystal, wherein the wavelength converting part converts the light amplified by the optical amplifier unit to light of the wavelength indicated by the output wavelength instruction signal. A storage unit stores correspondence information that indicates a correspondence relationship between the wavelength of the output light and the temperature of each of the nonlinear optical crystals based on the corresponding wavelength.Type: ApplicationFiled: March 30, 2011Publication date: October 6, 2011Applicant: NIKON CORPORATIONInventors: Yasutoshi TAKADA, Akira TOKUHISA
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Publication number: 20110164635Abstract: A laser device includes a partially reflective mirror for separating laser light into monitor light and output light, a light output monitor device for detecting the intensity of the monitor light from the partially reflective mirror, a controller for controlling the intensity of the output light from the partially reflective mirror by controlling the output of a laser light source on the basis of a detection value of the light output monitor device, and a power meter device for detecting the intensity of the output light from the partially reflective mirror during a predetermined calibration time period, wherein the controller calibrates the output of the light output monitor device on the basis of a detection value of the power meter device.Type: ApplicationFiled: December 23, 2010Publication date: July 7, 2011Applicant: NIKON CORPORATIONInventors: Yasutoshi TAKADA, Yoshiro TANI
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Patent number: 7974320Abstract: When the laser light source is caused to standby, the temperatures of semiconductor laser 1 and semiconductor laser 9 are changed by approximately 3° C. from the temperature when the laser light source is always being used. With a temperature change of approximately 3° C., the wavelengths of the laser light generated by semiconductor lasers 1 and 9 change approximately 0.3 nm. This change hardly has any effect at all on optical fiber amplifier 2 and optical fiber amplifier 10, but the conversion efficiencies at the respective wavelength conversion elements of the wavelength conversion optical system change, and, particularly, deep ultraviolet light is hardly generated at all any longer. Therefore, even while the laser light has been made incident to the wavelength conversion optical system, there is no longer damaging of the wavelength conversion elements. Therefore, it is possible to provide a laser light source standby method that is able to shorten the start up time of the laser light source.Type: GrantFiled: October 27, 2006Date of Patent: July 5, 2011Assignee: Nikon CorporationInventors: Akira Tokuhisa, Yasutoshi Takada
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Publication number: 20110143286Abstract: The present invention greatly reduces the likelihood that fiber fusion will occur. A laser apparatus comprises an excitation light source and an optical amplifier unit, which optically amplifies by receiving excitation light that is output from the excitation light source and that transits an optical fiber. A monitor unit monitors the power level of the excitation light transmitted from the excitation light source to the optical amplifier unit side via the optical fiber.Type: ApplicationFiled: February 17, 2011Publication date: June 16, 2011Applicant: NIKON CORPORATIONInventors: Yasutoshi TAKADA, Akira TOKUHISA
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Publication number: 20110069393Abstract: An optical element comprising: a substrate having two surfaces each having a micro-relief structure that includes numerous fine protrusions; and a film that includes one or more layers including a metal layer and is formed on one of the micro-relief structure.Type: ApplicationFiled: October 6, 2010Publication date: March 24, 2011Applicant: NIKON CORPORATIONInventors: Yutaka HAMAMURA, Kiyoshi KADOMATSU, Yasutoshi TAKADA, Yoshiro TANI
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Publication number: 20090147351Abstract: Grooves (22, 23) for containing an optical fiber and five recesses (24) for containing the optical components for an optical fiber amplifier are provided in the surface of a substrate (21). An optical fiber fitted in a groove (23a) for containing the optical fiber and introduced to the substrate (21) is passed through a groove (22a) for containing the optical fiber and fitted in a groove (22) for containing the optical fiber, thence passed through a groove (22b) for containing the optical fiber and introduced to the outside of the substrate (21). In the recess (24) for containing the optical component for an optical fiber amplifier, an optical component such as a photocoupler is fitted and coupled with the optical fiber. Light such as pumping light is passed through an optical fiber contained in the groove (23) for containing the optical fiber and introduced to an optical component such as a photocoupler.Type: ApplicationFiled: January 14, 2009Publication date: June 11, 2009Applicant: NIKON CORPORATIONInventors: Yoshinori Oshita, Yasutoshi Takada
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Publication number: 20090110012Abstract: When the laser light source is caused to standby, the temperatures of semiconductor laser 1 and semiconductor laser 9 are changed by approximately 3° C. from the temperature when the laser light source is always being used. With a temperature change of approximately 3° C., the wavelengths of the laser light generated by semiconductor lasers 1 and 9 change approximately 0.3 nm. This change hardly has any effect at all on optical fiber amplifier 2 and optical fiber amplifier 10, but the conversion efficiencies at the respective wavelength conversion elements of the wavelength conversion optical system change, and, particularly, deep ultraviolet light is hardly generated at all any longer. Therefore, even while the laser light has been made incident to the wavelength conversion optical system, there is no longer damaging of the wavelength conversion elements. Therefore, it is possible to provide a laser light source standby method that is able to shorten the start up time of the laser light source.Type: ApplicationFiled: October 27, 2006Publication date: April 30, 2009Applicant: Nikon CorporationInventors: Akira Tokuhisa, Yasutoshi Takada