Patents by Inventor Yasuyiikl MATSUMOTO

Yasuyiikl MATSUMOTO has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • MEMS DEVICE, LIQUID EJECTING HEAD, LIQUID EJECTING APPARATUS, MANUFACTURING METHOD OF MEMS DEVICE, MANUFACTURING METHOD OF LIQUID EJECTING HEAD, AND MANUFACTURING METHOD OF LIQUID EJECTING APPARATUS
    Publication number: 20210129535
    Abstract: Provided are an MEMS device, a liquid ejecting head, a liquid ejecting apparatus, a manufacturing method of a MEMS device, a manufacturing method of a liquid ejecting head and a manufacturing method of a liquid ejecting apparatus. Provided is a MEMS device that includes a first substrate on which a flexibly deformable thin film member is laminated, a second substrate disposed at an interval with respect to the first substrate, and an adhesion layer that adheres the first substrate to the second substrate, in which an end of the thin film member extends to the outside of the end of the first substrate in an in-plane direction of the first substrate.
    Type: Application
    Filed: December 5, 2017
    Publication date: May 6, 2021
    Inventors: Daisuke YAMADA, Motoki TAKABE, Yasuyiikl MATSUMOTO, Yoichi NAGANUMA, Eiju HIRAI