Abstract: A capacitor includes a substrate, a first electrode provided on the substrate, a dielectric film provided on the first electrode, a second electrode provided on the dielectric film and having an outer periphery positioned inside the outer periphery of the first electrode in a plan view viewed from above in a direction normal to an upper surface of the substrate, a third electrode that is in contact with the second electrode in a region inside the second electrode in the plan view, is separated upward from the first electrode and the dielectric film outside the region in the plan view, and has an outer periphery positioned inside the outer periphery of the first electrode and an outer periphery of the dielectric film in the plan view, and a protective film covering the second electrode and the third electrode and being in contact with the second electrode and the third electrode.