Patents by Inventor Yasuyoshi Kawase

Yasuyoshi Kawase has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Furnace structure of semiconductor manufacturing apparatus
    Patent number: 5232506
    Abstract: A furnace structure of a semiconductor manufacturing apparatus includes a process chamber, a pair of preliminary chambers, and shutters. The process chamber has a pair of openings in loading and unloading directions of a semiconductor substrate and is designed to perform a predetermined semiconductor manufacturing process. Each of preliminary chambers has a pair of openings and communicate with the process chamber, with one of each pair of openings opposing a corresponding one of the openings of the process chamber. The shutters are respectively arranged between the two openings of the process chamber and the opposing openings of the pair of preliminary chambers and designed to separate the process chamber from the preliminary chambers so as to be opened/closed.
    Type: Grant
    Filed: January 8, 1992
    Date of Patent: August 3, 1993
    Assignee: NEC Corporation
    Inventor: Yasuyoshi Kawase