Abstract: A back electrode type electronic part includes a main body including a circuit, and electrodes arranged for solder bumps on a back surface portion of the electronic part and connected to the circuit. Each of groups of the electrodes in portions of the electrode arrangement is provided for a single first solder bump which is larger than second solder bumps for the electrodes arranged other than the corner portions. Also, the group of electrodes includes electrodes having a substantially same potential level when the circuit operates.

Abstract: An intermediary agency enters into a contract with general users with respect to data distribution of an advertisement of goods, which was asked by advertisement clients, and the intermediary agency sets offer conditions of the advertisement of the goods and advertisement data in communication terminal apparatuses 14 of the general users. Since the advertisement data are offered in accordance with the offer conditions when the general users use these communication terminal apparatuses 14, the advertisement of the goods is offered to a number of general users as data with good efficiency.

Abstract: A flow control valve having a seating surface formed on a valve element to contact a valve seat when the valve is closed has a shape of a part of a hypothetical spherical surface having a spherical center at a center of a supporting member. Therefore, the distance from the center of the supporting member to the seating surface is kept constant, and the valve element can be seated at a periphery of the valve seat without a gap, even if the shaft is inclined. Thus, the valve leakage is reduced. The supporting member supports a shaft connected to the valve element movable in an axial direction of the shaft. The center of the supporting member is aligned with a center of the valve seat. Movement of the supporting member in a radial direction of the supporting member is prohibited. Therefore, the center of the supporting member is not displaced from the center of the valve seat in the radial direction. Accordingly, the displacement of the shaft in the radial direction can be prevented.

Abstract: A network type exposure unit connected via a communication network to other exposure units or to an information processor determines whether or not exposure work information of the instructed kind of exposure work is in the storage thereof. When the instructed exposure work information is determined to be non-existent, the unit inquires of the other exposure units or a host equipment whether or not there is therein the exposure work information, and decides executability of the exposure work requested to be started from the result thereof. The exposure work information can be transferred between arbitrary units, thereby alleviating complexity of maintenance and management of the exposure work information.

Abstract: A flow control valve having a seating surface formed on a valve element to contact a valve seat when the valve is closed has a shape of a part of a hypothetical spherical surface having a spherical center at a center of a supporting member. Therefore, the distance from the center of the supporting member to the seating surface is kept constant, and the valve element can be seated at a periphery of the valve seat without a gap, even if the shaft is inclined. Thus, the valve leakage is reduced. The supporting member supports a shaft connected to the valve element movable in an axial direction of the shaft. The center of the supporting member is aligned with a center of the valve seat. Movement of the supporting member in a radial direction of the supporting member is prohibited. Therefore, the center of the supporting member is not displaced from the center of the valve seat in the radial direction. Accordingly, the displacement of the shaft in the radial direction can be prevented.

Abstract: A fluid control solenoid valve includes a fluid passage having a valve seat therein. The solenoid valve further includes a bellows having a valve element and a retractable bellows portion continuous with the valve element. The valve element opens the fluid passage when lifted from the valve seat, and closes the fluid passage when seated onto the valve seat. A first spring urges the valve element in a valve lifting direction away from the valve seat, while a second spring urges the valve element in a valve seating direction toward the valve seat. An electromagnetic actuator is further provided for moving the valve element in the valve lifting direction, when energized. The first spring is interposed between an adjusting screw and the valve element. The adjusting screw is arranged to be extended at a high temperature so as to increase a biasing force of the first spring urging the valve element in the valve lifting direction.

Abstract: A mask aligner includes a TV image pick-up device having a wide field angle and picking up the image of a wafer detection pattern on an image pick-up station to generate TV signals at the output, a fine alignment device for detecting a positional deviation of the wafer relative to a mask in an exposure station with the detected result being used to align the wafer with the mask, a transport stage for carrying and transporting the wafer from the image pick-up station to the exposure station, a processing device for determining the positional deviation of the wafer relative to the reference position on the image pick-up stage in accordance with the TV signals, and a drive for moving the transport stage so as to remove the positional deviation of the wafer relative to the reference position of the exposure station.

Abstract: A mask aligner includes a photo-mask having a plurality of first marks used to align the photo-mask with a wafer and a plurality of second marks used to align the photo-mask with the mask aligner, the number of the second marks being equal to that of the first marks; a wafer having a plurality of third marks associated with the first marks; a mark providing section having a plurality of fourth marks associated with the second marks; and a detector for detecting an error in alignment between the first and third marks and also an error in alignment between the second and fourth marks, the detector including a plurality of sensors for sensing various marks in different positions, a basic form produced when the first and third marks are placed one above another being substantially the same as that produced when the second and fourth marks are placed one above another.

Abstract: Disclosed is a position detection signal processing apparatus to be used with a first body having a first pattern for alignment and a second body having a second pattern. The apparatus includes a pattern detecting device for detecting the first and second patterns and producing a detection signal stream, an expectation pulse forming circuit for forming an expectation pulse signal for specifying the portion of the detection signal stream in which the probability with which signals corresponding to the first and second patterns exist is high, and a true signal forming circuit for forming true signal streams corresponding to the first and second patterns from the detection signal stream and the expectation pulse signal.

Abstract: Two objects each having mark elements which extend in different directions are aligned. The mark elements are scanned by a linear slit-like illumination area, and the light reflected by the mark elements are used for the alignment. The direction or inclination of the linear-slit-like illumination area is changed, during one scanning deflection, to be in conformity with the mark elements.

Abstract: An apparatus for processing a signal for aligning a first object having at least one standard mark thereon with a second object having at least one reference mark thereon, includes a first sensor for sensing the standard mark, second sensor for sensing the reference mark through the first object, an illumination source for illuminating the standard mark and the reference mark, a first extracting circuit for extracting a signal concerning the standard mark from the signal stream of the first sensor, a second extracting circuit for extracting a signal concerning the reference mark from the signal stream of the second sensor, and a signal composing circuit for composing the signal concerning the standard mark and the signal concerning the reference mark.

Abstract: An apparatus for processing a signal for aligning a mask having at least one standard mark thereon with a wafer having at least one reference mark thereon, includes a first sensor for sensing the standard mark, a second sensor for sensing the reference mark through the mask, a threshold value determining circuit for detecting a peak value from a signal stream put out by the first sensor and determining a first threshold value and for detecting a peak value from a signal stream put out by the second sensor and determining a second threshold value, a signal converting circuit for converting a signal of a higher level than the first threshold value from the signal stream put out by the first sensor into a first digital signal and for converting a signal of a higher level than the second threshold value from the signal stream put out by the second sensor into a second digital signal, and a composing circuit for composing the first digital signal and the second digital signal.