Patents by Inventor Yasuyuki Masutani

Yasuyuki Masutani has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • SUBSTRATE TRANSFER APPARATUS FEATURING LOWER AND UPPER PNEUMATIC SUCKER ARMS, AND SUBSTRATE TRANSFER METHOD CARRIED OU IN SUCH SUBSTRATE TRANSFER APPARATUS
    Publication number: 20070297878
    Abstract: In a substrate transfer apparatus that pneumatically holds and transfers a substrate having first and second surfaces, a first pneumatic sucker arm has at least two first suction ports for pneumatically sucking the first surface of the substrate, and a second pneumatic sucker arm has at least two second suction ports for pneumatically sucking the second surface of the substrate. First and second drive mechanisms vertically move the first and second pneumatic sucker arms toward the respective first and second surfaces of the substrate, with the at least two first suction ports and the at least two second suction ports being directed to the respective first and surfaces of the substrate.
    Type: Application
    Filed: June 20, 2007
    Publication date: December 27, 2007
    Applicant: NEC Electronics Corporation
    Inventor: Yasuyuki Masutani