Abstract: To obtain a stage apparatus that can be divided for land transportation and can properly treat a substrate to be treated, the present invention provides a stage apparatus including a substrate holding plane which holds a substrate to be treated W, a pair of guide frames (13X) oppositely disposed with the substrate holding plane sandwiched therebetween, a gantry (13Y) which extends over the pair of guide frames (13X) and which is movably held by the pair of guide frames (13X), and a substrate treatment unit (14) which is disposed on the gantry (13Y).

Abstract: To enable division for transportation and secure proper treatment on a substrate to be treated, the present invention provides a stage apparatus (11) including a substrate holding plane which holds a substrate to be treated, a pair of guide frames (13X1), (13X2) oppositely disposed with the substrate holding plane sandwiched therebetween, and a gantry (13Y) which is movably held on upper surfaces of the pair of guide frames (13X1), (13X2). The stage apparatus (11) is composed of a first structure V1 which includes one guide frame (13X1), a second structure V2 which includes the other guide frame (13X2), and a third structure V3 which includes the gantry (13Y). Thus, even if the stage apparatus is large, since it can be divided into the structures V1 to V3, the stage apparatus can be transported by land. In addition, since there are no joints on a moving path of the gantry (13Y), the stage apparatus can properly treat the substrate without causing deterioration of moving accuracy.

Abstract: A method of inexpensively fabricating a superconducting cavity having thin, clean, and smooth superconductive films of excellent resonance characteristics, and the steps of forming a first thin film layer made of hydrogen transmission-preventive metal on the outer periphery of the core made of a metal having a higher ionization tendency than hydrogen in the electrochemical series, then forming a second thin film layer of superconducting material on the outer periphery of the first thin film layer, forming a third thin film layer made of a metal having a high thermal conductivity and a high bondabilty on the outside of the second thin film layer, forming a reinforced coating layer of stabilizing metal through composite fiber plated with copper on tungsten fiber on the third thin film layer, forming a cooling pipe on the outside, and then removing the core and the first thin film layer by dissolving with the surface of the superconductor being a replica of the core surface.