Patents by Inventor Yayoi Hosoya
Yayoi Hosoya has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 7217925Abstract: In order to provide a full-automatic scanning electron microscope which carries out investigation jobs full-automatically from fine adjustment to reviewing, the scanning electron microscope of the present invention has a function of calculating the accuracy of correction after correction of coordinates and displaying it with vectors 39, a function of automatically determining a searching magnification for automatic object detection from the obtained information after correction of coordinates, and a function of calculating the frequency of occurrence of objects or defects and a time required for measurement from the searching magnification and conditions of measurement.Type: GrantFiled: December 22, 2005Date of Patent: May 15, 2007Assignees: Hitachi, Ltd., Hitachi Science Systems, Ltd.Inventors: Yoshinori Nakada, Shunsuke Koshihara, Ryuichirou Tamochi, Yayoi Hosoya, Hidetoshi Morokuma
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Publication number: 20060102840Abstract: In order to provide a full-automatic scanning electron microscope which carries out investigation jobs full-automatically from fine adjustment to reviewing, the scanning electron microscope of the present invention has a function of calculating the accuracy of correction after correction of coordinates and displaying it with vectors 39, a function of automatically determining a searching magnification for automatic object detection from the obtained information after correction of coordinates, and a function of calculating the frequency of occurrence of objects or defects and a time required for measurement from the searching magnification and conditions of measurement.Type: ApplicationFiled: December 22, 2005Publication date: May 18, 2006Inventors: Yoshinori Nakada, Shunsuke Koshihara, Ryuichirou Tamochi, Yayoi Hosoya, Hidetoshi Morokuma
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Patent number: 7009178Abstract: In order to provide a full-automatic scanning electron microscope which carries out investigation jobs full-automatically from fine adjustment to reviewing, the scanning electron microscope of the present invention has a function of calculating the accuracy of correction after correction of coordinates and displaying it with vectors 39, a function of automatically determining a searching magnification for automatic object detection from the obtained information after correction of coordinates, and a function of calculating the frequency of occurrence of objects or defects and a time required for measurement from the searching magnification and conditions of measurement.Type: GrantFiled: April 11, 2005Date of Patent: March 7, 2006Assignees: Hitachi, Ltd., Hitachi Science Systems, Ltd.Inventors: Yoshinori Nakada, Shunsuke Koshihara, Ryuichirou Tamochi, Yayoi Hosoya, Hidetoshi Morokuma
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Publication number: 20050178965Abstract: In order to provide a full-automatic scanning electron microscope which carries out investigation jobs full-automatically from fine adjustment to reviewing, the scanning electron microscope of the present invention has a function of calculating the accuracy of correction after correction of coordinates and displaying it with vectors 39, a function of automatically determining a searching magnification for automatic object detection from the obtained information after correction of coordinates, and a function of calculating the frequency of occurrence of objects or defects and a time required for measurement from the searching magnification and conditions of measurement.Type: ApplicationFiled: April 11, 2005Publication date: August 18, 2005Inventors: Yoshinori Nakada, Shunsuke Koshihara, Ryuichirou Tamochi, Yayoi Hosoya, Hidetoshi Morokuma
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Patent number: 6897445Abstract: In order to provide a full-automatic scanning electron microscope which carries out investigation jobs full-automatically from fine adjustment to reviewing, the scanning electron microscope of the present invention has a function of calculating the accuracy of correction after correction of coordinates and displaying it with vectors 39, a function of automatically determining a searching magnification for automatic object detection from the obtained information after correction of coordinates, and a function of calculating the frequency of occurrence of objects or defects and a time required for measurement from the searching magnification and conditions of measurement.Type: GrantFiled: November 12, 2003Date of Patent: May 24, 2005Assignees: Hitachi, Ltd., Hitachi Science Systems, Ltd.Inventors: Yoshinori Nakada, Shunsuke Koshihara, Ryuichirou Tamochi, Yayoi Hosoya, Hidetoshi Morokuma
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Publication number: 20040094713Abstract: In order to provide a full-automatic scanning electron microscope which carries out investigation jobs full-automatically from fine adjustment to reviewing, the scanning electron microscope of the present invention has a function of calculating the accuracy of correction after correction of coordinates and displaying it with vectors 39, a function of automatically determining a searching magnification for automatic object detection from the obtained information after correction of coordinates, and a function of calculating the frequency of occurrence of objects or defects and a time required for measurement from the searching magnification and conditions of measurement.Type: ApplicationFiled: November 12, 2003Publication date: May 20, 2004Inventors: Yoshinori Nakada, Shunsuke Koshihara, Ryuichirou Tamochi, Yayoi Hosoya, Hidetoshi Morokuma
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Patent number: 6713761Abstract: In order to provide a full-automatic scanning electron microscope which carries out investigation jobs full-automatically from fine adjustment to reviewing, the scanning electron microscope of the present invention has a function of calculating the accuracy of correction after correction of coordinates and displaying it with vectors 39, a function of automatically determining a searching magnification for automatic object detection from the obtained information after correction of coordinates, and a function of calculating the frequency of occurrence of objects or defects and a time required for measurement from the searching magnification and conditions of measurement.Type: GrantFiled: May 24, 2001Date of Patent: March 30, 2004Assignees: Hitachi, Ltd., Hitachi Science Systems, Ltd.Inventors: Yoshinori Nakada, Shunsuke Koshihara, Ryuichirou Tamochi, Yayoi Hosoya, Hidetoshi Morokuma
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Publication number: 20010054692Abstract: In order to provide a full-automatic scanning electron microscope which carries out investigation jobs full-automatically from fine adjustment to reviewing, the scanning electron microscope of the present invention has a function of calculating the accuracy of correction after correction of coordinates and displaying it with vectors 39, a function of automatically determining a searching magnification for automatic object detection from the obtained information after correction of coordinates, and a function of calculating the frequency of occurrence of objects or defects and a time required for measurement from the searching magnification and conditions of measurement.Type: ApplicationFiled: May 24, 2001Publication date: December 27, 2001Inventors: Yoshinori Nakada, Shunsuke Koshihara, Ryuichirou Tamochi, Yayoi Hosoya, Hidetoshi Morokuma