Patents by Inventor Yehuda Pashut

Yehuda Pashut has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for the production of process gas that includes water vapor and hydrogen formed by burning oxygen in a hydrogen-rich environment
    Patent number: 7144826
    Abstract: The aim of the invention is the simple and economical production of a hydrogen-rich process gas from water vapour and hydrogen, whereby the proportion of water vapour to hydrogen may be precisely controllable and reproducible. Said aim is achieved, with a method and device for the production of a process gas for the treatment of substrates, in particular semiconductor substrates, in which the oxygen for formation of a process gas, comprising water vapour and hydrogen, is burnt in a hydrogen-rich environment in a combustion chamber.
    Type: Grant
    Filed: April 19, 2002
    Date of Patent: December 5, 2006
    Assignee: Mattson Thermal Products
    Inventors: Georg Roters, Roland Mader, Helmut Sommer, Genrih Erlikh, Yehuda Pashut
  • Method and apparatus for the production of process gases
    Publication number: 20040137754
    Abstract: The aim of the invention is the simple and economical production of a hydrogen-rich process gas from water vapour and hydrogen, whereby the proportion of water vapour to hydrogen may be precisely controllable and reproducible. Said aim is achieved, with a method and device for the production of a process gas for the treatment of substrates, in particular semiconductor substrates, in which the oxygen for formation of a process gas, comprising water vapour and hydrogen, is burnt in a hydrogen-rich environment in a combustion chamber.
    Type: Application
    Filed: February 2, 2004
    Publication date: July 15, 2004
    Inventors: Georg Roters, Roland Mader, Helmut Sommer, Genrih Erlikh, Yehuda Pashut