Patents by Inventor Yen-Liang Wu
Yen-Liang Wu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11973148Abstract: A semiconductor device and a method of forming the same is disclosed. The semiconductor device includes a substrate, a first well region disposed within the substrate, a second well region disposed adjacent to the first well region and within the substrate, and an array of well regions disposed within the first well region. The first well region includes a first type of dopants, the second well region includes a second type of dopants that is different from the first type of dopants, and the array of well regions include the second type of dopants. The semiconductor device further includes a metal silicide layer disposed on the array of well regions and within the substrate, a metal silicide nitride layer disposed on the metal silicide layer and within the substrate, and a contact structure disposed on the metal silicide nitride layer.Type: GrantFiled: November 18, 2021Date of Patent: April 30, 2024Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Ting-Ying Wu, Yung-Hsiang Chen, Yu-Lung Yeh, Yen-Hsiu Chen, Wei-Liang Chen, Ying-Tsang Ho
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Publication number: 20240119602Abstract: A micro-motion sensing device and a sensing method thereof are provided. The micro-motion sensing device includes a motion sensor, a motion classifier, and a render. The motion sensor receives an input radar signal and receives a video stream information through an image capturer. The motion sensor obtains velocity information and range information of an object according to the input radar signal, and generates a first video stream information by processing the video stream information according to the velocity information. The motion classifier generates a motion prediction information by classifying a motion of the object according to the velocity information, the range information, and the first video stream information. The render adjusts a rendered frequency of the first video stream information according to the velocity information.Type: ApplicationFiled: October 5, 2022Publication date: April 11, 2024Applicant: HTC CorporationInventors: Chun-Yih Wu, Ta-Chun Pu, Yen-Liang Kuo
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Publication number: 20240113676Abstract: A detection device for detecting an eyeball includes a frame element, a transceiver, and a contact lens element. The transceiver is disposed on the frame element. The transceiver transmits a first RF (Radio Frequency) signal. The contact lens element includes a resonator. The resonator converts the first RF signal into a first ultrasonic signal. The first ultrasonic signal is transmitted to the eyeball. The resonator converts a second ultrasonic signal from the eyeball into a second RF signal. The transceiver receives the second RF signal.Type: ApplicationFiled: September 29, 2022Publication date: April 4, 2024Applicant: HTC CorporationInventors: Chun-Yih WU, Ta-Chun PU, Yen-Liang KUO, Wei-Chih CHANG
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Publication number: 20240006311Abstract: A semiconductor structure is provided. The semiconductor structure includes a first substrate and a second substrate. The first substrate includes a first semiconductor layer, including a first trench isolation that extends through a portion of the first substrate layer; and a first interconnect structure, disposed over the first semiconductor layer. The second substrate includes a second semiconductor layer, including a plurality of semiconductor islands and surrounded by at least a second isolation penetrating the second semiconductor layer; a second interconnect structure, disposed over the second substrate layer and bonded to the first interconnect structure; and a dielectric layer, disposed over the second semiconductor layer opposite to the second interconnect structure. A method of manufacturing the semiconductor structure is also provided.Type: ApplicationFiled: July 3, 2022Publication date: January 4, 2024Inventors: KUAN-LIANG LIU, CHUNG-LIANG CHENG, YEN LIANG WU, CHUNG-YUAN LI, YA CHUN TENG
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Patent number: 11239082Abstract: A method for fabricating semiconductor device includes the steps of first forming a gate dielectric layer on a substrate; forming a gate material layer on the gate dielectric layer, and removing part of the gate material layer and part of the gate dielectric layer to form a gate electrode, in which a top surface of the gate dielectric layer adjacent to two sides of the gate electrode is lower than a top surface of the gate dielectric layer between the gate electrode and the substrate. Next, a first mask layer is formed on the gate dielectric layer and the gate electrode, part of the first mask layer and part of the gate dielectric layer are removed to form a first spacer, a second mask layer is formed on the substrate and the gate electrode, and part of the second mask layer is removed to forma second spacer.Type: GrantFiled: June 11, 2019Date of Patent: February 1, 2022Assignee: UNITED MICROELECTRONICS CORP.Inventors: I-Fan Chang, Yen-Liang Wu, Wen-Tsung Chang, Jui-Ming Yang, Jie-Ning Yang, Chi-Ju Lee, Chun-Ting Chiang, Bo-Yu Su, Chih-Wei Lin, Dien-Yang Lu
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Patent number: 10930517Abstract: A fin-shaped structure includes a substrate having a first fin-shaped structure located in a first area and a second fin-shaped structure located in a second area, wherein the second fin-shaped structure includes a ladder-shaped cross-sectional profile part. The present invention also provides two methods of forming this fin-shaped structure. In one case, a substrate having a first fin-shaped structure and a second fin-shaped structure is provided. A treatment process is performed to modify an external surface of the top of the second fin-shaped structure, thereby forming a modified part. A removing process is performed to remove the modified part through a high removing selectivity to the first fin-shaped structure and the second fin-shaped structure, and the modified part, thereby the second fin-shaped structure having a ladder-shaped cross-sectional profile part is formed.Type: GrantFiled: August 6, 2019Date of Patent: February 23, 2021Assignee: UNITED MICROELECTRONICS CORP.Inventors: Wen-Jiun Shen, Ssu-I Fu, Yen-Liang Wu, Chia-Jong Liu, Yu-Hsiang Hung, Chung-Fu Chang, Man-Ling Lu, Yi-Wei Chen
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Patent number: 10529856Abstract: A method of forming a semiconductor device is provided. At least one stacked structure is provided on a substrate. A first spacer material layer, a second spacer material layer, and a third spacer material layer are sequentially formed on the substrate and cover the stacked structure. The first, second, and third spacer material layers are etched to form a tri-layer spacer structure on the sidewall of the stacked structure. The tri-layer spacer structure includes, from one side of the stacked structure, a first spacer, a second spacer, and a third spacer, and a dielectric constant of the second spacer is less than each of a dielectric constant of the first spacer and a dielectric constant of the third spacer.Type: GrantFiled: July 5, 2018Date of Patent: January 7, 2020Assignee: United Microelectronics Corp.Inventors: Man-Ling Lu, Yu-Hsiang Hung, Chung-Fu Chang, Yen-Liang Wu, Wen-Jiun Shen, Chia-Jong Liu, Ssu-I Fu, Yi-Wei Chen
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Publication number: 20190362981Abstract: A fin-shaped structure includes a substrate having a first fin-shaped structure located in a first area and a second fin-shaped structure located in a second area, wherein the second fin-shaped structure includes a ladder-shaped cross-sectional profile part. The present invention also provides two methods of forming this fin-shaped structure. In one case, a substrate having a first fin-shaped structure and a second fin-shaped structure is provided. A treatment process is performed to modify an external surface of the top of the second fin-shaped structure, thereby forming a modified part. A removing process is performed to remove the modified part through a high removing selectivity to the first fin-shaped structure and the second fin-shaped structure, and the modified part, thereby the second fin-shaped structure having a ladder-shaped cross-sectional profile part is formed.Type: ApplicationFiled: August 6, 2019Publication date: November 28, 2019Inventors: Wen-Jiun Shen, Ssu-I Fu, Yen-Liang Wu, Chia-Jong Liu, Yu-Hsiang Hung, Chung-Fu Chang, Man-Ling Lu, Yi-Wei Chen
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Patent number: 10468493Abstract: The present invention provides a method of manufacturing a gate stack structure. The method comprises providing a substrate. A dielectric layer is then formed on the substrate and a gate trench is formed in the dielectric layer. A bottom barrier layer, a first work function metal layer and a top barrier layer are formed in the gate trench in sequence. Afterwards, a silicon formation layer is formed on the top barrier layer and filling the gate trench. A planarization process is performed, to remove a portion of the silicon formation layer, a portion of the bottom barrier layer, a portion of the first work function metal layer, and a portion of the top barrier layer. Next, the remaining silicon formation layer is removed completely, and a conductive layer is filled in the gate trench.Type: GrantFiled: December 6, 2018Date of Patent: November 5, 2019Assignee: UNITED MICROELECTRONICS CORP.Inventors: Chun-Ting Chiang, Chi-Ju Lee, Chih-Wei Lin, Bo-Yu Su, Yen-Liang Wu, Wen-Tsung Chang, Jui-Ming Yang, I-Fan Chang
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Publication number: 20190295849Abstract: A method for fabricating semiconductor device includes the steps of first forming a gate dielectric layer on a substrate; forming a gate material layer on the gate dielectric layer, and removing part of the gate material layer and part of the gate dielectric layer to form a gate electrode, in which a top surface of the gate dielectric layer adjacent to two sides of the gate electrode is lower than a top surface of the gate dielectric layer between the gate electrode and the substrate. Next, a first mask layer is formed on the gate dielectric layer and the gate electrode, part of the first mask layer and part of the gate dielectric layer are removed to form a first spacer, a second mask layer is formed on the substrate and the gate electrode, and part of the second mask layer is removed to forma second spacer.Type: ApplicationFiled: June 11, 2019Publication date: September 26, 2019Inventors: I-Fan Chang, Yen-Liang Wu, Wen-Tsung Chang, Jui-Ming Yang, Jie-Ning Yang, Chi-Ju Lee, Chun-Ting Chiang, Bo-Yu Su, Chih-Wei Lin, Dien-Yang Lu
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Patent number: 10418251Abstract: A fin-shaped structure includes a substrate having a first fin-shaped structure located in a first area and a second fin-shaped structure located in a second area, wherein the second fin-shaped structure includes a ladder-shaped cross-sectional profile part. The present invention also provides two methods of forming this fin-shaped structure. In one case, a substrate having a first fin-shaped structure and a second fin-shaped structure is provided. A treatment process is performed to modify an external surface of the top of the second fin-shaped structure, thereby forming a modified part. A removing process is performed to remove the modified part through a high removing selectivity to the first fin-shaped structure and the second fin-shaped structure, and the modified part, thereby the second fin-shaped structure having a ladder-shaped cross-sectional profile part is formed.Type: GrantFiled: August 29, 2017Date of Patent: September 17, 2019Assignee: UNITED MICROELECTRONICS CORP.Inventors: Wen-Jiun Shen, Ssu-I Fu, Yen-Liang Wu, Chia-Jong Liu, Yu-Hsiang Hung, Chung-Fu Chang, Man-Ling Lu, Yi-Wei Chen
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Patent number: 10388749Abstract: A semiconductor device includes a substrate, a gate structure, a spacer, a mask layer, and at least one void. The gate structure is disposed on the substrate, and the gate structure includes a metal gate electrode. The spacer is disposed on sidewalls of the gate structure, and a topmost surface of the spacer is higher than a topmost surface of the metal gate electrode. The mask layer is disposed on the gate structure. At least one void is disposed in the mask layer and disposed between the metal gate electrode and the spacer.Type: GrantFiled: July 23, 2018Date of Patent: August 20, 2019Assignee: UNITED MICROELECTRONICS CORP.Inventors: Yen-Liang Wu, Wen-Tsung Chang, Jui-Ming Yang, I-Fan Chang, Chun-Ting Chiang, Chih-Wei Lin, Bo-Yu Su, Chi-Ju Lee
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Patent number: 10366896Abstract: A method for fabricating semiconductor device includes the steps of first forming a gate dielectric layer on a substrate; forming a gate material layer on the gate dielectric layer, and removing part of the gate material layer and part of the gate dielectric layer to form a gate electrode, in which a top surface of the gate dielectric layer adjacent to two sides of the gate electrode is lower than a top surface of the gate dielectric layer between the gate electrode and the substrate. Next, a first mask layer is formed on the gate dielectric layer and the gate electrode, part of the first mask layer and part of the gate dielectric layer are removed to form a first spacer, a second mask layer is formed on the substrate and the gate electrode, and part of the second mask layer is removed to form a second spacer.Type: GrantFiled: August 28, 2017Date of Patent: July 30, 2019Assignee: UNITED MICROELECTRONICS CORP.Inventors: I-Fan Chang, Yen-Liang Wu, Wen-Tsung Chang, Jui-Ming Yang, Jie-Ning Yang, Chi-Ju Lee, Chun-Ting Chiang, Bo-Yu Su, Chih-Wei Lin, Dien-Yang Lu
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Publication number: 20190109202Abstract: The present invention provides a method of manufacturing a gate stack structure. The method comprises providing a substrate. A dielectric layer is then formed on the substrate and a gate trench is formed in the dielectric layer. A bottom barrier layer, a first work function metal layer and a top barrier layer are formed in the gate trench in sequence. Afterwards, a silicon formation layer is formed on the top barrier layer and filling the gate trench. A planarization process is performed, to remove a portion of the silicon formation layer, a portion of the bottom barrier layer, a portion of the first work function metal layer, and a portion of the top barrier layer. Next, the remaining silicon formation layer is removed completely, and a conductive layer is filled in the gate trench.Type: ApplicationFiled: December 6, 2018Publication date: April 11, 2019Inventors: Chun-Ting Chiang, Chi-Ju Lee, Chih-Wei Lin, Bo-Yu Su, Yen-Liang Wu, Wen-Tsung Chang, Jui-Ming Yang, I-Fan Chang
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Publication number: 20190043725Abstract: A method for fabricating semiconductor device includes the steps of first forming a gate dielectric layer on a substrate; forming a gate material layer on the gate dielectric layer, and removing part of the gate material layer and part of the gate dielectric layer to form a gate electrode, in which a top surface of the gate dielectric layer adjacent to two sides of the gate electrode is lower than a top surface of the gate dielectric layer between the gate electrode and the substrate. Next, a first mask layer is formed on the gate dielectric layer and the gate electrode, part of the first mask layer and part of the gate dielectric layer are removed to form a first spacer, a second mask layer is formed on the substrate and the gate electrode, and part of the second mask layer is removed to form a second spacer.Type: ApplicationFiled: August 28, 2017Publication date: February 7, 2019Inventors: I-Fan Chang, Yen-Liang Wu, Wen-Tsung Chang, Jui-Ming Yang, Jie-Ning Yang, Chi-Ju Lee, Chun-Ting Chiang, Bo-Yu Su, Chih-Wei Lin, Dien-Yang Lu
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Patent number: 10186594Abstract: The present invention provides a method of manufacturing a gate stack structure. The method comprises providing a substrate. A dielectric layer is then formed on the substrate and a gate trench is formed in the dielectric layer. A bottom barrier layer, a first work function metal layer and a top barrier layer are formed in the gate trench in sequence. Afterwards, a silicon formation layer is formed on the top barrier layer and filling the gate trench. A planarization process is performed, to remove a portion of the silicon formation layer, a portion of the bottom barrier layer, a portion of the first work function metal layer, and a portion of the top barrier layer. Next, the remaining silicon formation layer is removed completely, and a conductive layer is filled in the gate trench.Type: GrantFiled: July 4, 2017Date of Patent: January 22, 2019Assignee: UNITED MICROELECTRONICS CORP.Inventors: Chun-Ting Chiang, Chi-Ju Lee, Chih-Wei Lin, Bo-Yu Su, Yen-Liang Wu, Wen-Tsung Chang, Jui-Ming Yang, I-Fan Chang
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Publication number: 20190006484Abstract: A semiconductor device includes a substrate, a gate structure, a spacer, a mask layer, and at least one void. The gate structure is disposed on the substrate, and the gate structure includes a metal gate electrode. The spacer is disposed on sidewalls of the gate structure, and a topmost surface of the spacer is higher than a topmost surface of the metal gate electrode. The mask layer is disposed on the gate structure. At least one void is disposed in the mask layer and disposed between the metal gate electrode and the spacer.Type: ApplicationFiled: July 23, 2018Publication date: January 3, 2019Inventors: Yen-Liang Wu, Wen-Tsung Chang, Jui-Ming Yang, I-Fan Chang, Chun-Ting Chiang, Chih-Wei Lin, Bo-Yu Su, Chi-Ju Lee
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Patent number: 10170573Abstract: A semiconductor device includes a substrate, a metal gate on the substrate, and a first inter-layer dielectric (ILD) layer around the metal gate. A top surface of the metal gate is lower than a top surface of the ILD layer thereby forming a recessed region atop the metal gate. A mask layer is disposed in the recessed region. A void is formed in the mask layer within the recessed region. A second ILD layer is disposed on the mask layer and the first ILD layer. A contact hole extends into the second ILD layer and the mask layer. The contact hole exposes the top surface of the metal gate and communicates with the void. A conductive layer is disposed in the contact hole and the void.Type: GrantFiled: October 12, 2017Date of Patent: January 1, 2019Assignee: UNITED MICROELECTRONICS CORP.Inventors: Chun-Ting Chiang, Jie-Ning Yang, Chi-Ju Lee, Chih-Wei Lin, Bo-Yu Su, Yen-Liang Wu, I-Fan Chang, Jui-Ming Yang, Wen-Tsung Chang
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Publication number: 20180358448Abstract: The present invention provides a method of manufacturing a gate stack structure. The method comprises providing a substrate. A dielectric layer is then formed on the substrate and a gate trench is formed in the dielectric layer. A bottom barrier layer, a first work function metal layer and a top barrier layer are formed in the gate trench in sequence. Afterwards, a silicon formation layer is formed on the top barrier layer and filling the gate trench. A planarization process is performed, to remove a portion of the silicon formation layer, a portion of the bottom barrier layer, a portion of the first work function metal layer, and a portion of the top barrier layer. Next, the remaining silicon formation layer is removed completely, and a conductive layer is filled in the gate trench.Type: ApplicationFiled: July 4, 2017Publication date: December 13, 2018Inventors: Chun-Ting Chiang, Chi-Ju Lee, Chih-Wei Lin, Bo-Yu Su, Yen-Liang Wu, Wen-Tsung Chang, Jui-Ming Yang, I-Fan Chang
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Patent number: D973038Type: GrantFiled: January 14, 2020Date of Patent: December 20, 2022Assignee: ATHENA DATA TECHNOLOGY LTD.Inventors: Yen-Liang Wu, Yu Chia Hsu