Patents by Inventor YEN-TUNG HU

YEN-TUNG HU has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and system for generating photomask patterns
    Patent number: 11320742
    Abstract: The present disclosure provides a method and a system for generating photomask patterns. The system obtains a design layout image, and generates a hotspot image corresponding to the design layout image based on a hotspot detection model. The system generates two photomask patterns based on the hotspot image. The at least two photomask patterns are transferred onto a semiconductor substrate.
    Type: Grant
    Filed: June 6, 2019
    Date of Patent: May 3, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Yen-Tung Hu, Kuan-Chi Chen, Ya-Hsuan Wu, Shiuan-Li Lin, Chih-Chung Huang, Chi-Ming Tsai
  • METHOD AND SYSTEM FOR GENERATING PHOTOMASK PATTERNS
    Publication number: 20200133134
    Abstract: The present disclosure provides a method and a system for generating photomask patterns. The system obtains a design layout image, and generates a hotspot image corresponding to the design layout image based on a hotspot detection model. The system generates two photomask patterns based on the hotspot image. The at least two photomask patterns are transferred onto a semiconductor substrate.
    Type: Application
    Filed: June 6, 2019
    Publication date: April 30, 2020
    Inventors: YEN-TUNG HU, KUAN-CHI CHEN, YA-HSUAN WU, SHIUAN-LI LIN, CHIH-CHUNG HUANG, CHI-MING TSAI