Patents by Inventor Yen-Wen Lin

Yen-Wen Lin has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20250006700
    Abstract: A stacking structure including a first die and a second die bonded with the first die is provided. The first die has a first region and a second region encircled by the first region. The first die includes first metallization structures having a first seal ring structure and a first bonding structure having first dummy pads located over the first seal ring structure. The second die includes second metallization structures having a second seal ring structure and a second bonding structure having second dummy pads located over the second seal ring structure. The first die and the second die are bonded through bonding of the first and second bonding structures. The first and second seal ring structures are substantially vertically aligned, and the first dummy pads are respectively bonded with the second dummy pads.
    Type: Application
    Filed: June 28, 2023
    Publication date: January 2, 2025
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chen-Sheng Lin, Ning Jiang, Chao-Wen Shih, Kuo-Chiang Ting, Yen-Ming Chen
  • Publication number: 20240420994
    Abstract: A semiconductor device includes a substrate, a heat dissipation dielectric layer, a conductive interconnect structure, and a blocking dielectric layer. The heat dissipation dielectric layer is disposed on the substrate and has a thermal conductivity greater than 10 W/mK. The conductive interconnect structure is disposed in the heat dissipation dielectric layer. The blocking dielectric layer is disposed in the heat dissipation dielectric layer to isolate the conductive interconnect structure from the heat dissipation dielectric layer.
    Type: Application
    Filed: June 14, 2023
    Publication date: December 19, 2024
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Li-Ling SU, Ming-Hsien LIN, Hsin-Ping CHEN, Shao-Kuan LEE, Cheng-Chin LEE, Yen-Ju WU, Hsin-Yen HUANG, Hsi-Wen TIEN, Chih-Wei LU, Chia-Chen LEE
  • Publication number: 20240413087
    Abstract: A method of manufacturing an interconnect structure includes forming an opening through a dielectric layer. The opening exposes a top surface of a first conductive feature. The method further includes forming a barrier layer on sidewalls of the opening, passivating the exposed top surface of the first conductive feature with a treatment process, forming a liner layer over the barrier layer, and filling the opening with a conductive material. The liner layer may include ruthenium.
    Type: Application
    Filed: July 31, 2024
    Publication date: December 12, 2024
    Inventors: Shu-Cheng Chin, Ming-Yuan Gao, Chen-Yi Niu, Yen-Chun Lin, Hsin-Ying Peng, Chih-Hsiang Chang, Pei-Hsuan Lee, Chi-Feng Lin, Chih-Chien Chi, Hung-Wen Su
  • Publication number: 20240410854
    Abstract: A semiconductor structure is disclosed. The semiconductor structure includes a semiconductor substrate, a hydrogen sensing stacked layer disposed over the semiconductor substrate, and a protection layer disposed on the hydrogen sensing stacked layer. The hydrogen sensing stacked layer comprises a hydrogen-free oxide layer and a metal oxide layer disposed on the hydrogen-free oxide layer.
    Type: Application
    Filed: June 12, 2023
    Publication date: December 12, 2024
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: I-Che Lee, Huai-Ying Huang, Yen-Chieh Huang, Kai-Wen Cheng, Yu-Ming Lin, Chung-Te Lin
  • Publication number: 20240414924
    Abstract: Embodiments of the present disclosure provide a method including forming a gate electrode over a substrate, forming a ferroelectric layer over the gate electrode, forming a channel layer over the ferroelectric layer, forming a capping layer over the channel layer, wherein the capping layer includes one or more of CeOx, BeOx, InOx, GaOx, AlOx, SnOx, VOx, WOx, TiOx, ZrOx, NbOx, HfOx, SiOx, TaOx, a binary metal oxide based on any combination of the preceding metal oxides, or a ternary metal oxide based on any combination of the preceding metal oxides, annealing, after forming the capping layer, at a temperature less than 350° C., forming a dielectric layer over the capping layer, and forming a source contact and a drain contact in the dielectric layer.
    Type: Application
    Filed: June 6, 2023
    Publication date: December 12, 2024
    Inventors: I-Che LEE, Yen-Chieh HUANG, Huai-Ying HUANG, Kai-Wen CHENG, Yu-Ming LIN, Chung-Te LIN
  • Patent number: 12165975
    Abstract: A method of manufacturing an interconnect structure includes forming an opening through a dielectric layer. The opening exposes a top surface of a first conductive feature. The method further includes forming a barrier layer on sidewalls of the opening, passivating the exposed top surface of the first conductive feature with a treatment process, forming a liner layer over the barrier layer, and filling the opening with a conductive material. The liner layer may include ruthenium.
    Type: Grant
    Filed: July 13, 2023
    Date of Patent: December 10, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Shu-Cheng Chin, Ming-Yuan Gao, Chen-Yi Niu, Yen-Chun Lin, Hsin-Ying Peng, Chih-Hsiang Chang, Pei-Hsuan Lee, Chi-Feng Lin, Chih-Chien Chi, Hung-Wen Su
  • Publication number: 20240404975
    Abstract: Various embodiments of the present disclosure are directed towards an integrated chip. The integrated chip includes an interconnect structure overlying a semiconductor substrate and comprising a conductive wire. A passivation structure overlies the interconnect structure. An upper conductive structure overlies the passivation structure and comprises a first conductive layer, a dielectric layer, and a second conductive layer. The first conductive layer is disposed between the dielectric layer and the passivation structure. The second conductive layer extends along a top surface of the dielectric layer and penetrates through the first conductive layer and the passivation structure to the conductive wire.
    Type: Application
    Filed: July 25, 2024
    Publication date: December 5, 2024
    Inventors: Tzu-Yu Lin, Yao-Wen Chang, Chia-Wen Zhong, Yen-Liang Lin
  • Publication number: 20240404991
    Abstract: Embodiments include methods of forming three-dimensional packages and the packages resulting therefrom. The packages may utilize a bridge die to electrically connect one die to another die and at least one additional die adjacent to the bridge die. The height-to-width ratio of the gap between the bridge die and the at least one additional die is controlled by thinning the bridge die to be thinner than the at least one additional die. The packages may utilize landing structures to adjoin a dielectric material of an attached die to a metallic landing structure of a base die.
    Type: Application
    Filed: June 2, 2023
    Publication date: December 5, 2024
    Inventors: Chao-Wen Shih, Min-Chien Hsiao, Kuo-Chiang Ting, Yen-Ming Chen, Ashish Kumar Sahoo, Chen-Sheng Lin, Hsin-Yu Pan
  • Publication number: 20240387169
    Abstract: A method for forming a semiconductor device is provided.
    Type: Application
    Filed: May 17, 2023
    Publication date: November 21, 2024
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yen-Chieh Huang, I-Cheng Chang, Kai-Wen Cheng, Yu-Ming Lin, Chung-Te Lin
  • Publication number: 20240387256
    Abstract: In some implementations, one or more semiconductor processing tools may form a via within a substrate of a semiconductor device. The one or more semiconductor processing tools may deposit a ruthenium-based liner within the via. The one or more semiconductor processing tools may deposit, after depositing the ruthenium-based liner, a copper plug within the via.
    Type: Application
    Filed: July 29, 2024
    Publication date: November 21, 2024
    Inventors: Yao-Min LIU, Ming-Yuan GAO, Ming-Chou CHIANG, Shu-Cheng CHIN, Huei-Wen HSIEH, Kai-Shiang KUO, Yen-Chun LIN, Cheng-Hui WENG, Chun-Chieh LIN, Hung-Wen SU
  • Patent number: 12142664
    Abstract: A polysilicon layer is formed over a substrate. The polysilicon layer is etched to form a dummy gate electrode having a top portion with a first lateral dimension and a bottom portion with a second lateral dimension. The first lateral dimension is greater than, or equal to, the second lateral dimension. The dummy gate electrode is replaced with a metal gate electrode.
    Type: Grant
    Filed: May 18, 2021
    Date of Patent: November 12, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Shih Wei Bih, Han-Wen Liao, Xuan-You Yan, Yen-Yu Chen, Chun-Chih Lin
  • Publication number: 20240371685
    Abstract: In some embodiments, the present disclosure relates to a process tool that includes a chamber housing defining a processing chamber. Within the processing chamber is a wafer chuck configured to hold a substrate. Further, a bell jar structure is arranged over the wafer chuck such that an opening of the bell jar structure faces the wafer chuck. A plasma coil is arranged over the bell jar structure. An oxygen source coupled to the processing chamber and configured to input oxygen gas into the processing chamber.
    Type: Application
    Filed: July 17, 2024
    Publication date: November 7, 2024
    Inventors: Yen-Liang Lin, Chia-Wen Zhong, Yao-Wen Chang, Min-Chang Ching, Kuo-Liang Lu, Cheng-Yuan Tsai, Ru-Liang Lee
  • Publication number: 20240371822
    Abstract: A method includes: forming first semiconductor dies in a first wafer, each die of the first semiconductor dies comprising: first active devices over a front-side of a first semiconductor substrate; performing first probe tests on the first wafer; based on the first probe tests, classifying each die of the first semiconductor dies as a first good die, a first marginal die, or a first bad die; forming second semiconductor dies in a second wafer; performing second probe tests on the second wafer; based on the second probe tests, classifying each die of the second semiconductor dies as a second good die, a second marginal die, or a second bad die; and bonding the second wafer to the first wafer, each die of the first semiconductor dies aligning with a corresponding die of the second semiconductor dies.
    Type: Application
    Filed: August 31, 2023
    Publication date: November 7, 2024
    Inventors: Chen-Sheng Lin, Chao-Wen Shih, Kuo-Chiang Ting, Yen-Ming Chen
  • Publication number: 20240342229
    Abstract: The present disclosure relates to an anti-fatigue Lactobacillus composition. The anti-fatigue Lactobacillus composition, which includes at least one of Lactobacillus brevis GKEX, Lactobacillus plantarum GKK1 and Lactobacillus johnsonii GKJ2 as an active ingredient, administered to a healthy subject for a continuous period of time, can significantly improve fatigue-related biochemical indices and prolong aerobic exercise time to exhaustion, and thus can be used as an active ingredient for preparation of various compositions for anti-fatigue and/or improving athletic ability.
    Type: Application
    Filed: June 27, 2024
    Publication date: October 17, 2024
    Inventors: Chin-Chu CHEN, Yen-Lien CHEN, Shih-Wei LIN, You-Shan TSAI, Tzu-Chun LIN, Ci-Sian WANG, Yu-Hsin HOU, Yang-Tzu SHIH, Ching-Wen LIN, Ya-Jyun CHEN, Jia-Lin JIANG, Zi-He WU, Yen-Po CHEN
  • Publication number: 20240311050
    Abstract: The present invention discloses a data access interface unit comprising: a physical storage device controller for receiving a first control signal from a first storage virtualization controller, and accordingly determining the first storage virtualization controller as the primary controller, and generating a first selection signal; a selector for receiving the first selection signal, and accordingly selecting data and signals from the first storage virtualization controller; and a clock generation circuit for providing a dedicated clock signal to the physical storage device, where when the physical storage device controller receives a re-set signal from a second storage virtualization controller, the physical storage device controller determines the second storage virtualization controller as the new primary controller, and accordingly generates a second selection signal so as to control the selector to select data and signals from the second storage virtualization controller.
    Type: Application
    Filed: November 22, 2023
    Publication date: September 19, 2024
    Applicant: Infortrend Technology, Inc.
    Inventors: Yen-Chen Wu, Ying-Wen Lin, Chih-Min Hsiao
  • Publication number: 20240312901
    Abstract: An interconnect structure including a contact via in an interlayer dielectric, a first conductive feature in a first dielectric layer, the first dielectric layer over the interlayer dielectric, a first liner in the first dielectric layer, the first liner comprising a first part in contact with a sidewall surface of the first conductive feature, and a second part in contact with a bottom surface of the first conductive feature. The interconnect structure includes a first cap layer in contact with a top surface of the first conductive feature, a second conductive feature in a second dielectric layer, the second dielectric layer over the first dielectric layer, a second liner in the second dielectric layer, wherein the first and second conductive features comprise a first conductive material, and the contact via, first liner, first cap layer, and second liner comprise a second conductive material chemically different than the first conductive material.
    Type: Application
    Filed: July 12, 2023
    Publication date: September 19, 2024
    Inventors: Chien CHANG, Yen-Chun LIN, Jen-Wei LIU, Chih-Han TSENG, Harry CHIEN, Cheng-Hui WENG, Chun-Chieh LIN, Hung-Wen SU, Ming-Hsing TSAI, Chih-Wei CHANG
  • Patent number: 12094770
    Abstract: In some implementations, one or more semiconductor processing tools may form a via within a substrate of a semiconductor device. The one or more semiconductor processing tools may deposit a ruthenium-based liner within the via. The one or more semiconductor processing tools may deposit, after depositing the ruthenium-based liner, a copper plug within the via.
    Type: Grant
    Filed: August 30, 2021
    Date of Patent: September 17, 2024
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yao-Min Liu, Ming-Yuan Gao, Ming-Chou Chiang, Shu-Cheng Chin, Huei-Wen Hsieh, Kai-Shiang Kuo, Yen-Chun Lin, Cheng-Hui Weng, Chun-Chieh Lin, Hung-Wen Su
  • Publication number: 20240269077
    Abstract: A solution for preserving extracellular vesicles/exosomes has a carrier solvent selected from a group consisting of polysorbate 80, sucrose, and polyethylene glycol 3350/4000; and a stabilizer selected from a group consisting of salts, amino acids, and amino acid salts; wherein the pH of the preservation solution ranges from 5 to 7.4.
    Type: Application
    Filed: February 6, 2024
    Publication date: August 15, 2024
    Inventors: Yi-Wen Chan, Ming-You SHIE, Yen CHEN, Der-Yang CHO, Shao-Chih CHIU, Yen-Hong LIN, Kai-Wen KAN
  • Patent number: 12062692
    Abstract: A plurality of first semiconductor layers and second semiconductor layers are formed over a front side of a substrate. The first semiconductor layers interleave with the second semiconductor layers in a vertical direction. The first semiconductor layers and second semiconductor layers are etched into a plurality of stacks. The etching is performed such that a bottommost first semiconductor layer is etched to have a tapered profile in a cross-sectional view. The bottommost first semiconductor layer is replaced with a dielectric layer. The dielectric layer inherits the tapered profile of the bottommost first semiconductor layer. Gate structures are formed over the stacks. The gate structures each extend in a first horizontal direction. A first interconnect structure is formed over the gate structures. A second interconnect structure is formed over a back side of the substrate.
    Type: Grant
    Filed: August 27, 2021
    Date of Patent: August 13, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Shu-Wen Shen, Wei-Yang Lee, Yen-Po Lin, Jiun-Ming Kuo, Kuo-Yi Chao, Yuan-Ching Peng
  • Publication number: 20240244007
    Abstract: A reordering method performed by a receiving apparatus is provided. The receiving apparatus may receive a first PPDU from a transmitting apparatus, wherein the first PPDU includes a plurality of MPDUs, and the MPDUs correspond to the same BA window. The receiving apparatus may determine a traffic that each of the MPDUs belongs to according to an MPDU identification, wherein traffics that the plurality of MPDUs belonging to include a first traffic and a second traffic which is different from the first traffic. The receiving apparatus may perform a reordering operation for the MPDUs belonging to the first traffic, and a reordering operation for the MPDUs belonging to the second traffic, respectively. The receiving apparatus may transmit a BA frame in response to the first PPDU to the transmitting apparatus, wherein the BA frame includes information for indicating whether the MPDUs in the first PPDU have been successfully received.
    Type: Application
    Filed: January 17, 2024
    Publication date: July 18, 2024
    Inventors: Chi-Han HUANG, Yen-Hsiung TSENG, Cheng-Ying WU, Wei-Wen LIN