Patents by Inventor Yen-Yu Pan

Yen-Yu Pan has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • GAS DISTRIBUTION SHOWER MODULE AND FILM DEPOSITION APPARATUS
    Publication number: 20110247559
    Abstract: A gas distribution shower module and a film deposition apparatus are provided. The gas distribution shower module includes a first distributor, a second distributor, a third distributor and a fourth distributor. The second distributor is under the first distributor, the third distributor is under the second distributor, the fourth distributor is under the third distributor, and a distance is between the fourth distributor and the third distributor. The third distributor is divided into an inner region and an outer region, and an area ratio of the inner region to the outer region is from 1:1 to 1:5. Furthermore, the third distributor has a plurality of gas holes in the inner region and the outer region, and an area ratio of the gas holes in the inner region to the gas holes in the outer region is from 1:1 to 1:5.
    Type: Application
    Filed: August 10, 2010
    Publication date: October 13, 2011
    Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
    Inventors: Jun-Chin Liu, Yen-Yu Pan, Chih-Yung Huang, Jung-Chen Chien, Shun-Yuan Lo