Patents by Inventor Yenni Yang

Yenni Yang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Photoresist system
    Patent number: 7477959
    Abstract: A photoresist system is disclosed. A graphical user interface of the system allows an operator to initiate a bottle switching operation, among other operations. Barcode data of a photoresist bottle is obtained by an equipment server from a controller. Photoresist data relating to the bottle is obtained by the equipment server from a database through a constraint server. The equipment server, preferably with assistance from the constraint server, determines whether the bottle contains appropriate photoresist for the semiconductor processing to be performed on semiconductor wafers. If the bottle contains appropriate photoresist, the equipment server, through the constraint server, stores the expiration date of the bottle and the batch identifier of the bottle, as indicated by the barcode data, in the database. If the bottle contains inappropriate photoresist, then the system acts to prevent the semiconductor processing of the semiconductor wafers with the inappropriate photoresist contained in the bottle.
    Type: Grant
    Filed: June 26, 2002
    Date of Patent: January 13, 2009
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Yenni Yang, Fu-Kai Yeh
  • Photoresist system
    Publication number: 20040002773
    Abstract: A photoresist system is disclosed. A graphical user interface of the system allows an operator to initiate a bottle switching operation, among other operations. Barcode data of a photoresist bottle is obtained by an equipment server from a controller. Photoresist data relating to the bottle is obtained by the equipment server from a database through a constraint server. The equipment server, preferably with assistance from the constraint server, determines whether the bottle contains appropriate photoresist for the semiconductor processing to be performed on semiconductor wafers. If the bottle contains appropriate photoresist, the equipment server, through the constraint server, stores the expiration date of the bottle and the batch identifier of the bottle, as indicated by the barcode data, in the database. If the bottle contains inappropriate photoresist, then the system acts to prevent the semiconductor processing of the semiconductor wafers with the inappropriate photoresist contained in the bottle.
    Type: Application
    Filed: June 26, 2002
    Publication date: January 1, 2004
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Yenni Yang, Fu-Kai Yeh