Abstract: Provided is a device for visualizing a temperature and an amount of static electricity, wherein the device is arranged adjacent to a substrate processing liquid providing unit including a pipe to provide a passage through which a substrate processing liquid is transferred and a processing liquid storage module for storing the substrate processing liquid, the device including a photographing unit configured to generate a plurality of partially captured images by photographing a plurality of areas of a measurement target, a static electricity sensor configured to measure static electricity levels of the plurality of areas of the measurement target, a thermal imaging camera configured to measure temperatures of the plurality of areas of the measurement target, a processor configured to generate an entire image by combining the plurality of partially captured images with each other, and an output unit configured to output a visualization image.

Abstract: An apparatus for dispensing droplet may include a droplet discharging member, a stage and a control member. The droplet discharging member may include a plurality of nozzles arranged in a first direction by a constant interval. The stage may receive a substrate including a plurality of regions for forming a plurality of pixels of a same size disposed in the first direction and a second direction substantially perpendicular to the first direction. The control member may control the droplet discharging member such that amounts of droplets may be substantially identical in the regions of the substrate for the pixels if the numbers of the nozzles of the droplet discharging member with respect to sides of the regions of the substrate for the pixels are different in the first direction.

Abstract: An apparatus for dispensing droplet may include a droplet discharging member, a stage and a control member. The droplet discharging member may include a plurality of nozzles arranged in a first direction by a constant interval. The stage may receive a substrate including a plurality of regions for forming a plurality of pixels of a same size disposed in the first direction and a second direction substantially perpendicular to the first direction. The control member may control the droplet discharging member such that amounts of droplets may be substantially identical in the regions of the substrate for the pixels if the numbers of the nozzles of the droplet discharging member with respect to sides of the regions of the substrate for the pixels are different in the first direction.