Patents by Inventor Yeong-Been KIM

Yeong-Been KIM has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • SUBSTRATE PROCESSING APPARATUS AND GAS SUPPLY METHOD THEREOF
    Publication number: 20240309504
    Abstract: Provided is a gas supply method of a substrate processing apparatus, more particularly, a gas supply method for controlling a supplied amount of gas more precisely when a gas such as a raw material is supplied to a substrate.
    Type: Application
    Filed: March 10, 2024
    Publication date: September 19, 2024
    Applicant: TES CO., LTD
    Inventors: Yeong-Been KIM, Hyun-Shik AHN
  • SUBSTRATE BONDING APPARATUS AND SUBSTRATE BONDING METHOD
    Publication number: 20220208720
    Abstract: The present invention relates to a substrate bonding apparatus including: a chamber; a first chuck disposed inside the chamber to adhere a first substrate; a second chuck disposed facingly inside the chamber toward the first chuck to adhere a second substrate; and a camera located above or under the first chuck and the second chuck to recognize first alignment key disposed on the first substrate and second alignment key disposed on the second substrate.
    Type: Application
    Filed: December 20, 2021
    Publication date: June 30, 2022
    Applicant: TES CO., LTD
    Inventors: Joo-Il HA, Yeong-Been KIM, Jae-Hwan KIM, Dong-Min NOH, Woo-Pil SHIM