Patents by Inventor Yeong-Hawn Kim

Yeong-Hawn Kim has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Light exposure apparatus
    Patent number: 7606020
    Abstract: A light exposure apparatus includes a chuck adapted to receive a substrate on a surface thereof, a plurality of first lift pins in the chuck that are able to move up and down to load/unload the substrate on/from the chuck, and a plurality of second lift pins in the chuck to discharge electrostatic charges of the chuck and the substrate.
    Type: Grant
    Filed: December 7, 2005
    Date of Patent: October 20, 2009
    Assignee: LG Display Co., Ltd.
    Inventor: Yeong-Hawn Kim
  • Light exposure apparatus
    Publication number: 20060139843
    Abstract: A light exposure apparatus includes a chuck adapted to receive a substrate on a surface thereof, a plurality of first lift pins in the chuck that are able to move up and down to load/unload the substrate on/from the chuck, and a plurality of second lift pins in the chuck to discharge electrostatic charges of the chuck and the substrate.
    Type: Application
    Filed: December 7, 2005
    Publication date: June 29, 2006
    Inventor: Yeong-Hawn Kim