Patents by Inventor Yeonjun Lim

Yeonjun Lim has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • POLISHING PAD-MEASURING APPARATUS AND CHEMICAL MECHANICAL POLISHING FACILITY USING THE SAME
    Publication number: 20170291278
    Abstract: Example embodiments of the inventive concepts provide a polishing pad-measuring apparatus and a chemical mechanical polishing facility using the same. The polishing pad-measuring apparatus includes a foreign material-removing part for removing a foreign material disposed in grooves extending from one surface of a polishing pad toward another surface, opposite to the one surface, of the polishing pad, and a distance measuring part for measuring depths of the grooves from which the foreign material is removed.
    Type: Application
    Filed: January 24, 2017
    Publication date: October 12, 2017
    Applicant: Samsung Electronics Co., Ltd.
    Inventors: Kwangsung LEE, Ki-Roo Shin, Kwangchun Kim, Yeonjun Lim, Junghun Cho, Sangkyeong Han