Patents by Inventor Yeonsoek YOO

Yeonsoek YOO has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • ETCHING COMPOSITION AND METHOD OF MANUFACTURING INTEGRATED CIRCUITS USING THE SAME
    Publication number: 20240059967
    Abstract: An etching composition for etching a titanium aluminum nitride layer and a method of manufacturing an integrated circuit, the etching composition includes about 15 wt % to about 30 wt % of an oxidizing agent; about 1 wt % to about 10 wt % of a pH adjusting agent, the pH adjusting agent including an inorganic acid or an organic acid; about 0.001 wt % to about 1 wt % of an etching booster; and a solvent, all wt % being based on a total weight of the etching composition.
    Type: Application
    Filed: July 28, 2023
    Publication date: February 22, 2024
    Applicant: Oci Company Ltd.
    Inventors: Daihyun KIM, Taesoo KWON, Yeonsoek YOO, Mihyun PARK, Sangwon BAE, Hyosan LEE, Wook JANG