Patents by Inventor YEOU-CHYI NI

YEOU-CHYI NI has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • APPARATUS AND METHOD FOR MANUFACTURING SEMICONDUCTOR STRUCTURE
    Publication number: 20230064706
    Abstract: An apparatus and a method forming a semiconductor structure are provided. The method includes receiving a substrate; mounting the substrate to a polishing head with a side of the substrate facing a polishing pad, the polishing pad comprising a first region and a second region; grinding the substrate against the polishing pad; and adjusting a temperature of the first region and a temperature of the second region.
    Type: Application
    Filed: August 30, 2021
    Publication date: March 2, 2023
    Inventors: CHIEN-LIN HUANG, YEOU-CHYI NI