Patents by Inventor Yeuk-Fai E. Mok

Yeuk-Fai E. Mok has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • METHOD AND APPARATUS FOR SELF-CALIBRATION OF A SUBSTRATE HANDLING ROBOT
    Publication number: 20090182454
    Abstract: A substrate-handling robot which serves a processing tool such as a plating tool may be automatically controlled by a controller to perform a self-calibration procedure. As part of the procedure, an end effector of the robot is moved to interact with sensors provided on a calibration fixture that is positioned in a substrate placement location for which the calibration procedure is performed. The calibration fixture may have an opening formed therein to allow movement of the robot end effector within the calibration fixture. Sensor light beams generated by the sensors may interact with the end effector during the automatic calibration process so as to determine calibration data for the substrate placement location.
    Type: Application
    Filed: January 14, 2008
    Publication date: July 16, 2009
    Inventors: Bernardo Donoso, Yeuk-Fai E. Mok, Vincent E. Burkhardt
  • Method and apparatus for self-calibration of a substrate handling robot
    Patent number: 7319920
    Abstract: A substrate-handling robot which serves a processing tool such as a plating tool may be automatically controlled by a controller to perform a self-calibration procedure. As part of the procedure, an end effector of the robot is moved to interact with sensors provided on a calibration fixture that is positioned in a substrate placement location for which the calibration procedure is performed. The calibration fixture may have an opening formed therein to allow movement of the robot end effector within the calibration fixture. Sensor light beams generated by the sensors may interact with the end effector during the automatic calibration process so as to determine calibration data for the substrate placement location.
    Type: Grant
    Filed: November 10, 2003
    Date of Patent: January 15, 2008
    Assignee: Applied Materials, Inc.
    Inventors: Bernardo Donoso, Yeuk-Fai E. Mok, Vincent E. Burkhardt