Patents by Inventor Yevgeniy Barskiy

Yevgeniy Barskiy has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Radio frequency power delivery system
    Patent number: 8710926
    Abstract: A system and method are provided for delivering power to a dynamic load. The system includes a power supply providing DC power having a substantially constant power open loop response, a power amplifier for converting the DC power to RF power, a sensor for measuring voltage, current and phase angle between voltage and current vectors associated with the RF power, an electrically controllable impedance matching system to modify the impedance of the power amplifier to at least a substantially matched impedance of a dynamic load, and a controller for controlling the electrically controllable impedance matching system. The system further includes a sensor calibration measuring module for determining power delivered by the power amplifier, an electronic matching system calibration module for determining power delivered to a dynamic load, and a power dissipation module for calculating power dissipated in the electrically controllable impedance matching system.
    Type: Grant
    Filed: February 8, 2012
    Date of Patent: April 29, 2014
    Assignee: MKS Instruments, Inc.
    Inventors: Siddharth P. Nagarkatti, Yevgeniy Barskiy, Feng Tian, Ilya Bystryak
  • Radio Frequency Power Delivery System
    Publication number: 20120262064
    Abstract: A system and method are provided for delivering power to a dynamic load. The system includes a power supply providing DC power having a substantially constant power open loop response, a power amplifier for converting the DC power to RF power, a sensor for measuring voltage, current and phase angle between voltage and current vectors associated with the RF power, an electrically controllable impedance matching system to modify the impedance of the power amplifier to at least a substantially matched impedance of a dynamic load, and a controller for controlling the electrically controllable impedance matching system. The system further includes a sensor calibration measuring module for determining power delivered by the power amplifier, an electronic matching system calibration module for determining power delivered to a dynamic load, and a power dissipation module for calculating power dissipated in the electrically controllable impedance matching system.
    Type: Application
    Filed: February 8, 2012
    Publication date: October 18, 2012
    Applicant: MKS Instruments, Inc.
    Inventors: Siddharth P. Nagarkatti, Yevgeniy Barskiy, Feng Tian, Ilya Bystryak
  • RADIO FREQUENCY POWER DELIVERY SYSTEM
    Publication number: 20080179948
    Abstract: A system and method are provided for delivering power to a dynamic load. The system includes a power supply providing DC power having a substantially constant power open loop response, a power amplifier for converting the DC power to RF power, a sensor for measuring voltage, current and phase angle between voltage and current vectors associated with the RF power, an electrically controllable impedance matching system to modify the impedance of the power amplifier to at least a substantially matched impedance of a dynamic load, and a controller for controlling the electrically controllable impedance matching system. The system further includes a sensor calibration measuring module for determining power delivered by the power amplifier, an electronic matching system calibration module for determining power delivered to a dynamic load, and a power dissipation module for calculating power dissipated in the electrically controllable impedance matching system.
    Type: Application
    Filed: February 1, 2008
    Publication date: July 31, 2008
    Applicant: MKS INSTRUMENTS, INC.
    Inventors: Siddharth P. Nagarkatti, Yevgeniy Barskiy, Feng Tian, Ilya Bystryak