Patents by Inventor Yevgeny Kruptesky

Yevgeny Kruptesky has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Methods and systems for determining drift in a position of a light beam with respect to a chuck
    Patent number: 7511816
    Abstract: Methods and systems for determining drift in a position of a light beam with respect to a chuck are provided. One method includes illuminating a surface with the light beam. The surface has a predetermined position with respect to the chuck during illumination. The method also includes generating signals responsive to the illumination of the surface and determining the drift in the position of the light beam with respect to the chuck using the signals. One system includes an illumination subsystem configured to illuminate a fiduciary with the light beam. The fiduciary has a predetermined position with respect to the chuck during illumination. This system also includes a detector configured to generate signals responsive to the illumination of the fiduciary and a processor configured to use the signals to determine the drift in the position of the light beam with respect to the chuck.
    Type: Grant
    Filed: June 16, 2005
    Date of Patent: March 31, 2009
    Assignee: KLA-Tencor Technologies Corp.
    Inventors: Juergen Reich, Yevgeny Kruptesky, Christian Wolters
  • Methods and systems for determining drift in a position of a light beam with respect to a chuck
    Publication number: 20060285112
    Abstract: Methods and systems for determining drift in a position of a light beam with respect to a chuck are provided. One method includes illuminating a surface with the light beam. The surface has a predetermined position with respect to the chuck during illumination. The method also includes generating signals responsive to the illumination of the surface and determining the drift in the position of the light beam with respect to the chuck using the signals. One system includes an illumination subsystem configured to illuminate a fiduciary with the light beam. The fiduciary has a predetermined position with respect to the chuck during illumination. This system also includes a detector configured to generate signals responsive to the illumination of the fiduciary and a processor configured to use the signals to determine the drift in the position of the light beam with respect to the chuck.
    Type: Application
    Filed: June 16, 2005
    Publication date: December 21, 2006
    Inventors: Juergen Reich, Yevgeny Kruptesky, Christian Wolters