Patents by Inventor Yeyuan Yang

Yeyuan Yang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Defect classification utilizing data from a non-vibrating contact potential difference sensor
    Patent number: 7900526
    Abstract: A method and system for identifying and classifying non-uniformities on the surface of a semiconductor or in a semiconductor. The method and system involves scanning the wafer surface with a non-vibrating contact potential difference sensor to detect the locations of non-uniformities, extracting features characteristic of the non-uniformities, and applying a set of rules to these features to classify the type of each non-uniformity.
    Type: Grant
    Filed: November 30, 2007
    Date of Patent: March 8, 2011
    Assignee: QCEPT Technologies, Inc.
    Inventors: Jeffrey Alan Hawthorne, M. Brandon Steele, Yeyuan Yang, Mark Schulze
  • Semiconductor inspection system and apparatus utilizing a non-vibrating contact potential difference sensor and controlled illumination
    Patent number: 7659734
    Abstract: A method and system for identifying a defect or contamination on the surface of a semiconductor or in a semiconductor. The method and system involves providing a semiconductor with a surface, such as a semiconductor wafer, providing a non-vibrating contact potential difference sensor, providing a source of illumination with controllable intensity or distribution of wavelengths, using the illumination source to provide controlled illumination of the surface of the wafer under or near the non-vibrating contact potential sensor probe tip, using the non-vibrating contact potential difference sensor to scan the wafer surface during controlled illumination, generating data representative of changes in contact potential difference across the wafer surface, and processing that data to identify a pattern characteristic of a defect or contamination.
    Type: Grant
    Filed: March 7, 2007
    Date of Patent: February 9, 2010
    Assignee: Qcept Technologies, Inc.
    Inventors: Jeffrey Alan Hawthorne, M. Brandon Steele, Yeyuan Yang, Mark Schulze
  • DEFECT CLASSIFICATION UTILIZING DATA FROM A NON-VIBRATING CONTACT POTENTIAL DIFFERENCE SENSOR
    Publication number: 20090139312
    Abstract: A method and system for identifying and classifying non-uniformities on the surface of a semiconductor or in a semiconductor. The method and system involves scanning the wafer surface with a non-vibrating contact potential difference sensor to detect the locations of non-uniformities, extracting features characteristic of the non-uniformities, and applying a set of rules to these features to classify the type of each non-uniformity.
    Type: Application
    Filed: November 30, 2007
    Publication date: June 4, 2009
    Inventors: Jeffrey Alan Hawthorne, M. Brandon Steele, Yeyuan Yang, Mark Schulze
  • Semiconductor inspection system and apparatus utilizing a non-vibrating contact potential difference sensor and controlled illumination
    Publication number: 20080217530
    Abstract: A method and system for identifying a defect or contamination on the surface of a semiconductor or in a semiconductor. The method and system involves providing a semiconductor with a surface, such as a semiconductor wafer, providing a non-vibrating contact potential difference sensor, providing a source of illumination with controllable intensity or distribution of wavelengths, using the illumination source to provide controlled illumination of the surface of the wafer under or near the non-vibrating contact potential sensor probe tip, using the non-vibrating contact potential difference sensor to scan the wafer surface during controlled illumination, generating data representative of changes in contact potential difference across the wafer surface, and processing that data to identify a pattern characteristic of a defect or contamination.
    Type: Application
    Filed: March 7, 2007
    Publication date: September 11, 2008
    Inventors: Jeffrey Alan Hawthorne, M. Brandon Steele, Yeyuan Yang, Mark Schulze